Edwards iXM Series User Manual

4.6.5 Connect the nitrogen supply
WARNING: DANGEROUS SUBSTANCES
Risk of asphyxiaon. A r
elease of nitrogen can cause asphyxiaon. The nitrogen
supply must enable isolaon in accordance with SEMI S2 Lockout and tagout
requirements.
CAUTION: NITROGEN SUPPLY
Risk of damage to the equipment. Make sure that the nitrogen supply agrees with
requirements. If it does not, the gas pipelines can become blocked or the dry
pumping system can be damaged.
Refer to Figure: Controls/connectors on the rear of the system for locaon of the
nitrogen purge port. The gas module in the system can be adjusted to suit process
demands. Refer to Gas module conguraon on page 64.
Refer to Table: Nitrogen purge data for nitrogen supply requirements.
Flammable/pyrophoric materials
WARNING: FLAMMABLE GASES
Risk of injury and damag
e to the equipment. Obey the instrucons and make note of
precauons to make sure that the pumped gases do not enter their ammable
ranges.
When ammable or pyrophoric materials are in the pump there can be addional risks.
The user must assess and manage these risks as part of the process tool installaon.
The severity of the risks and the necessary control measures will depend on if:
▪ the tool exhaust is in the ammable region
▪ this is part of normal pr
ocess tool operaon
▪ it can only occur in rare condions.
The addional risks occur because all dry pumps must be considered a possible source
of ignion caused by the heat of compression, or fricon. If ignion occurs:
▪ High pressures can occur in the pump and possibly not be contained.
▪ A ame front can travel back up the foreline.
▪ A ame front can travel downstream from the exhaust of the pump.
Industry best pracce suggests that the following measures will decrease the risks of
pumping ammable mixtures and pyrophoric materials. The user must do a risk
assessment and take appropriate measures:
▪ Do not let air enter the equipment.
▪ Make sure that the system is leak ght.
▪ Pr
event the entry of the pump gases in the ammable range. To achieve this,
supply sucient inert gas purge to dilute the pump gases. For example, diluon
with nitrogen to below one quarter LEL (Lower Explosive Limit) or, if that is not
praccal, to below 60% LOC (Liming Oxidant Concentraon).
10/2020 - ©Edwards Limited
Page 35M56635880_D
M56635880_D - Inst
allaon

Edwards iXM Series Specifications

General

Brand	Edwards
Model	iXM Series
Category	Water Pump
Language	English