Edwards iXM Series User Manual

13. Accessories
The accessories av
ailable for use with the iXM dry pump system are:
13.1 Disconnect box
The disconnect box ensures full compliance with SEMI S2 by providing true EMO
funconality and also provides interlock with photohelic switch.
Table 39 Disconnect box
Item
Item number
Photohelic switch and gauge kit A50803000
Power disconnect box Low iXM200 EL0103003
Power disconnect box Low iXM600 / 1200 EL0103004
Power disconnect box High iXM200 EL0103005
Power disconnect box High iXM600 / 1200 EL0103006
Power disconnect box Low iXM3000 A50802000
Power disconnect box High iXM3000 Contact supplier
13.2 Accessory modules
Two accessory modules are available for the iXM dry pump system. The Acve Accessory
Module (AAM) gives connecvity for up to three directly connected accessories
including a gate valve, abatement and water ow sensor. It also gives connecvity for up
to two supported acve accessories, two thermocouples and the pump status output.
The Passive Accessory Module (PAM) allows up to 3 accessories to be connected to the
accessory module interface.
An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m
away from the dry pump system.
Table 40 Accessories modules
Accessory module
Item number
AAM D37480500
PAM D37480550
Accessory module extension cable (5.0 m) D37491502
13.3 Pump Display Terminal (PDT)
The PDT allows control and monitoring of the pump.
Table 41
PDT
Item
Item number
PDT D37280700
10/2020 - ©Edwards Limited
Page 93M56635880_D
M56635880_D - Accessories

Edwards iXM Series Specifications

General

Brand	Edwards
Model	iXM Series
Category	Water Pump
Language	English