Edwards iXM Series User Manual

13.8 Interface modules
13.8.1 MicroTIM
T
ool specic control and monitoring via parallel interface (except for LAM-LON and
RS232 Micro-TIM's which are serial interface devices).
Table 46 Tool specic modules
MicroTIMs
Item number
SPI D37360310
MCM D37360320
TEL D37360330
E73 D37360340
LAM D37360350
C3 D37360360
Hitachi D37360370
eTIM D37361500
LON TP-1250* D37362000
EtherCAT®† D37363000
Conguraon storage D37360390
RS232 D37370385
* For use with Lam 2300 plaorms with LON communicaon.
† EtherCAT® is a registered trademark and patented technology, licensed by Beckho
Automaon GmbH, Germany.
13.8.2 EMS modules
Tool specic controlled stop interfaces.
Table 47 Tool specic EMS modules
EMS Modules
Item number
SPI D37370310
MCM D37370320
LAM D37370350
C3 D37370360
13.8.3 iGateway modules
The Pump LON to Ethernet iGateway and Serial to Ethernet iGateway give an addional
Ethernet connecon to the Drypump. This is used for connecon to an Edwards
Fabworks / EdCentra system or third party equipment using Semi E54.
The Pump-Serial to Pump-LON and Dual SIM Gateway connects to an Edwards Drypump.
This gives connecons to support LON networks and components and two isolated
RS232 serial links with Edwards Serial Interface Module (SIM) protocol.
10/2020 - ©Edwards Limited
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M56635880_D - Accessories

Edwards iXM Series Specifications

General

Brand	Edwards
Model	iXM Series
Category	Water Pump
Language	English