Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
280672EB
2010-12-15
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3 Operation
Operation is allowed after completion of the installation procedure only.
3.1 Introduction
The valve cluster solution is designed to operate multiple valves (exhaust lines) installed on a single process chamber in
parallel. The system consists of one Master valve and a number of Slave valves. A valve cluster can have up to 255
valves. Each valve in the Cluster has a unique cluster address (see chapter «Cluster address configuration (setup step
2)» for details). A digital field bus system is used for the inter communication between the Master and the Slave valves.
The Master valve is taking care of the pressure control, while the Slave valves are following the Master valves plate
position. It can be operated in pressure control mode or in position control mode. In both cases local or remote operation
is possible.
Therefore the host system mainly communicates with the Master valve. The Master valve then takes care of controlling the
Slave valves. All status information about the condition of each individual valve in the Cluster can be requested from the
Master valve.
For basic operation of the valve cluster the known standard command set is used. In addition there are special commands
available for getting status information of each valve connected to the Cluster. Further it is possible to control individual
Slave valves independently. For example, it is possible to close a single valve, while the valve cluster is still operational.
There is also a parameter (Position offset) for fine tuning single exhaust lines.
120 terminator category 5 cables 120 terminator
valve cluster daisy chain
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