Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
280672EB
2010-12-15
50/94
Gasflow calculation for LEARN:
Do not apply a different gasflow for learn than determined below. Otherwise pressure control
performance may be insufficient.
1. Calculate gasflow for learn. Choose the applicable formula depending on units you are familiar with.
p
SFS
• C
min
• n
q
L
=
q
L
gasflow for learn [Pa m
3
/s]
p
SFS
sensor full scale pressure [Pa]
C
min
min. controllable conductance of valve [l/s]
(refer to «Technical data»)
n number of valves in valve cluster, used during pressure control
p
SFS
• C
min
• n
q
L
=
q
L
gasflow for learn [mbar l/s]
p
SFS
sensor full scale pressure [mbar]
C
min
min. controllable conductance of valve [l/s]
(refer to «Technical data»)
n number of valves in valve cluster, used during pressure control
q
L
= 39.4 • p
SFS
• C
min
• n
q
L
gasflow for learn [sccm]
p
SFS
sensor full scale pressure [Torr]
C
min
min. controllable conductance of valve [l/s]
(refer to «Technical data»)
n number of valves in valve cluster, used during pressure control
3.7 Close valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «OUTPUT Buffer» > «CONTROL
MODE SETPOINT» for details)
Push CLOSE button
1. In «OUTPUT Buffer» > «CONTROL MODE
SETPOINT»
2. Select the [Close] (value = 3)
3.8 Open valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «OUTPUT Buffer» > «CONTROL
MODE SETPOINT» for details)
Push OPEN button
1. In «OUTPUT Buffer» > «CONTROL MODE
SETPOINT»
2. Select [Open] (value = 4)
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