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Keithley
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6517A
Keithley 6517A User Manual
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Front Panel Operation
2-114
T
est Sequence
Diode:
Start V
oltage
Stop V
oltage
Step V
oltage
Delay
Capacitor:
Bias V
oltage
Points
Interv
al
Cable:
Bias V
oltage
Points
Interv
al
Resistor:
Source V1
Delay 1
Source V2
Delay 2
Surface Resisti
vity:
Pre-discharge T
ime
Bias V
oltage
Bias T
ime
Measure V
oltage
Measure T
ime
Discharge T
ime
V
olume Resistivity:
Pre-discharge T
ime
Bias V
oltage
Bias T
ime
Measure V
oltage
Measure T
ime
Discharge T
ime
Alternating Polarity:
Of
fset V
oltage
Alternating V
oltage
Measurement T
ime
Discarded Readings
Stored Readings
SIR:
Bias V
oltage
Bias T
ime
Measure V
oltage
Measure T
ime
Square W
av
e
Sweep:
High Le
vel
High T
ime
Lo
w Lev
el
Lo
w T
ime
Cycle Count
Diode
1V
10V
1V
1 sec
1V
10
1 sec
1V
5
1 sec
1V
1 sec
2V
1 sec
0.2 sec
500V
1 sec
500V
1 sec
2 sec
10 sec
500V
1 sec
500V
1 sec
2 sec
0V
10V
15 sec
3
1
50V
1 sec
100V
1 sec
1V
1 sec
-1V
1 sec
10
Diode
1V
10V
1V
1 sec
1V
10
1 sec
1V
5
1sec
1V
1 sec
2V
1 sec
0.2 sec
500V
1 sec
500V
1 sec
2 sec
10 sec
500V
1 sec
500V
1 sec
2 sec
0V
10V
15 sec
3
1
50V
1 sec
100V
1 sec
1V
1 sec
-1V
1 sec
10
T
able 2-30 (cont.)
F
actory default conditions
Function or operation
Bench default
(SYST
em:PRESet)
GPIB default (*RST)
135
137
Table of Contents
Default Chapter
5
Safety Precautions
5
Table of Contents
7
List of Illustrations
14
List of Tables
17
1 General Information
19
Introduction
19
Features
19
Warranty Information
20
Manual Addenda
20
Safety Symbols and Terms
20
Specifications
20
Inspection
20
Options and Accessories
20
2 Front Panel Operation
22
Introduction
22
Power-Up
23
Line Power Connections
23
Line Fuse Replacement
23
Figure 2-1 Line Voltage Switch
23
Power-Up Sequence
24
Warm-Up Period
25
IEEE-488 Primary Address
25
Display
25
Exponent Mode (Engineering or Scientific)
25
Information Messages
25
Status and Error Messages
26
Figure 2-A Input Signal
26
Navigating Menus
29
Connections - Electrometer, High-Resistance Meter, and V-Source
30
Figure 2-6 Maximum Input Levels
31
Figure 2-10 V-Source Output
32
High-Resistance Meter Connections
32
Voltage Source Output Connections
32
Figure 2-11 Noise Shield
33
Low Noise Cables, Shielding, and Guarding
33
Figure 2-12 Guard Shield
34
Figure 2-13 Safety Shield
34
Floating Circuits
34
Figure 2-14 Floating Measurements
35
Figure 2-15 Floating V-Source
35
Test Fixtures
36
Figure 2-18 Interlock Connections
38
Voltage Measurements
39
Basic Measurement Procedure
39
Figure 2-19 Hard-Wired Interlock
39
Volts Configuration
42
Voltage Measurement Considerations
43
Figure 2-22 Meter Loading
44
Current Measurements
45
Basic Measurement Procedure
45
Amps Configuration
48
Current Measurement Considerations
49
Resistance and Resistivity Measurements
53
Resistance Measurements
54
Resistivity Measurements
57
Ohms Configuration
60
Current Measurement Considerations
63
Multiple Display
63
Ohms Measurement Considerations
63
Charge Measurements (Q)
63
Basic Measurement Procedure
64
Coulombs Configuration
64
Charge Measurement Considerations
66
Voltage Source
67
Sourcing Options
67
Setting Voltage Source Value
69
Voltage and Current Limit
70
Interlock and Test Fixtures
71
Operate
71
Analog Outputs
71
Analog Output
72
Preamp out
73
Using External Feedback
75
Electrometer Input Circuitry
75
Shielded Fixture Construction
75
Shielded Fixture Construction
76
External Feedback Procedure
76
Non-Standard Coulombs Ranges
77
Logarithmic Currents
77
Non-Decade Current Gains
78
Range and Resolution
78
Measurement Range
78
Display Resolution
78
Zero Check, Relative, and Zero Correct
79
Zero Check
79
Figure 2-45 Non-Decade Current Gains
79
Relative (REL)
80
Zero Correct
81
Test Sequences
81
Test Descriptions
81
Configure Test Sequence
89
Running the Selected Test
91
Triggers
92
Trigger Model
94
Figure 2-56 Basic Trigger Model
94
Figure 2-57 Advanced Trigger Model
95
Basic Trigger Configuration
97
External Triggering
97
Advanced Trigger Configuration
98
External Triggering
103
Figure 2-61 DUT Test System
104
Trigger Link
104
Trigger Link
105
Figure 2-63 Trigger Link Connector
106
Figure 2-64 DUT Test System
107
Figure 2-65 Trigger Link Connections (Asynchronous Example #1)
107
Figure 2-67 Connections Using Trigger Link Adapter
110
Figure 2-68 DUT Test System (Asynchronous Example #2)
110
Buffer
116
Configuring Data Storage
118
Storing and Recalling Readings
120
Filters
121
Buffer Multiple Displays
122
Filters
122
Digital Filters
123
Median Filter
123
Figure 2-75 Digital Filter; Averaging and Advanced Filter Types
124
Figure 2-76 Digital Filter; Moving and Repeating Filter Modes
125
Percent
126
Math
127
Polynomial
127
Percent
127
Percent Deviation
127
Deviation
127
Ratio
127
Logarithmic
127
Ratio
128
Logarithmic
128
Selecting and Configuring Math
128
Menu
128
Calculate Multiple Display
129
Menu
129
Savesetup
130
Savesetup
132
Communication
133
Digital Filters
134
Median Filter
134
Communication
138
Cal
139
Test
139
Test
140
Math
140
Limits
140
Figure 2-77 Limits Bar Graph Example
141
Status-Msg
142
General
142
Figure 2-79 Digital I/O Port
142
Scanning
147
Internal Scanning
147
External Scanning
147
Other Measurement Considerations
148
Ground Loops
148
Triboelectric Effects
149
Piezoelectric and Stored Charge Effects
149
Electrochemical Effects
149
Humidity
149
Light
149
Electrostatic Interference
149
Figure 2-84 Eliminating Ground Loops
149
Magnetic Fields
150
Electromagnetic Interference (EMI)
150
Relative Humidity and External Temperature Readings
150
3 IEEE-488 Reference
152
Introduction
152
IEEE-488 Bus Connections
153
Figure 3-1 IEEE-488 Connector
153
Figure 3-2 IEEE-488 Connections
153
Serial Interface Connections
154
GPIB Primary Address Selection
154
GPIB Programming Language Selection
155
Quickbasic 4.5 Programming
155
General Bus Commands
156
REN (Remote Enable)
156
IFC (Interface Clear)
156
LLO (Local Lockout)
157
GTL (Go to Local)
157
DCL (Device Clear)
157
SDC (Selective Device Clear)
157
GET (Group Execute Trigger)
157
SPE, SPD (Serial Polling)
157
Front Panel Aspects of IEEE-488 Operation
158
Error and Status Messages
158
IEEE-488 Status Indicators
158
LOCAL Key
158
Status Structure
158
Figure 3-6 Standard Event Status
160
Operation Event Status
160
Figure 3-8 Arm Event Status
161
Figure 3-9 Sequence Event Status
162
Figure 3-10 Trigger Event Status
163
Figure 3-11 Measurement Event Status
164
Condition Registers
165
Transition Filters
165
Enable Registers
166
Event Registers
166
Queues
166
Status Byte and Service Request (SRQ)
167
Trigger Model (IEEE-488 Operation)
169
Arm Layer
170
Scan Layer
170
Measure Layer
170
Trigger Model (Ieee-488 Bus Operation)
170
Programming Syntax
172
Program Messages
175
Common Commands
178
CLS - Clear Status
178
ESE <Nrf> - Event Enable
179
ESE? - Event Enable Query
179
ESR? - Event Status Register Query
180
Standard Event Enable Register
180
Standard Event Status Register
180
IDN? - Identification Query
181
OPC - Operation Complete
182
OPC? - Operation Complete Query
183
OPT? - Option Identification Query
184
RCL - Recall
184
RST - Reset the Model 6517A
184
SAV - Save the Current Setup in Memory
184
SRE <Nrf> - Service Request Enable
185
SRE? - Service Request Enable Query
185
STB? - Status Byte Query
186
Figure 3-18 Status Byte Register
186
TRG - Trigger
187
TST? - Self-Test Query
187
WAI - Wait-To-Continue
187
Signal Oriented Measurement Commands
189
Scpi Command Subsystems
192
Scpi Command Summary
193
Table 3-10 Sense Command Summary
197
Table 3-12 Status Command Summary
204
Table 3-14 Trace Command Summary
207
Table 3-16 :Tsequence Command Summary
210
Figure 2-52 Alternating Polarity Resistance/Resistivity Test
211
Calculate Subsystems
213
Calculate[1]
213
Data Commands
214
Calculate2
216
Calculate3
218
Calibration Subsystem
222
Display Subsystem
223
Main Menu
224
Format Subsystem
226
Ascii Data Format
227
Ieee754 Single Precision Data Format (32 Data Bits)
227
Elements <Item List
228
Output Subsystems
231
Route Subsystem
232
Close <List
232
OPEN <List
232
Open:all
233
SCAN Commands
233
Sense1 Subsystem
236
Function <Name
236
DATA Commands
236
Aperture <N
238
Nplcycles <N
240
Range Commands
241
Reference <N
246
Ireference <B
248
Digits <N
248
Average Commands
249
Count <N
250
Median Commands
251
Damping <B
252
Guard <B
252
Adischarge Commands
253
Xfeedback <B
253
Vscontrol <Name
253
Mselect <Name
254
Resistivity Commands
254
Source Subsystem
257
Digital Output Commands
257
V-Source Configuration Commands
257
Status Subsystem
260
Event]
260
Figure 3-22 Measurement Event Register
261
Figure 3-24 Operation Event Register
263
Figure 3-25 Trigger Event Register
264
Figure 3-26 Arm Event Register
264
Enable <Nrf
265
Figure 3-27 Sequence Event Register
265
Figure 3-28 Measurement Event Enable Register
266
Figure 3-29 Questionable Event Enable Register
266
Figure 3-30 Operation Event Enable Register
267
Figure 3-31 Trigger Event Enable Register
267
Figure 3-32 Arm Event Enable Register
267
Figure 3-33 Sequence Event Enable Register
268
Ptransition <Nrf
268
Figure 3-34 Measurement Transition Filter
269
Questionable Transition Filter
270
Operation Transition Filter
271
Figure 3-37 Trigger Transition Filter
272
Figure 3-38 Arm Transition Filter
273
Figure 3-39 Sequence Transition Filter
274
Ntransition <Nrf
275
Condition
277
Preset
277
Queue Commands
278
System Subsystem
280
Preset
280
Posetup <Name
280
Version
280
Error
280
Lsync:state <B
281
KEY <Nrf
281
Clear
282
Figure 3-40 Key-Press Codes
282
DATE <Yr>, <Mo>, <Day
283
TIME <Hr>, <Min>, <Sec
283
Tstamp Commands
283
Rnumber:reset
284
Zero Check and Zero Correct Commands
284
A/D Controls
285
Interface Commands
286
Basic Trigger Commands
286
Interlock
288
Trace Subsystem
288
Clear
288
Free
288
Points <N
289
FEED Commands
290
Data
292
Tstamp:format <Name
292
Elements <Item List
292
Trigger Subsystem
293
Initiate Commands
293
Abort
293
Immediate
293
Immediate
294
Count <N
294
Delay <N
294
Source <Name
295
Timer <N
295
Signal
296
Tconfigure Commands
296
Rtclock Commands
298
Date <Yr>, <Mo>, <Day
298
Time <Hr>, <Min>, <Sec
298
Tsequence Subsystem
299
General Test Sequence Commands
299
Start <Nrf
300
STOP <Nrf
301
STEP <Nrf
301
Mdelay <Nrf
301
Svoltage <Nrf
302
Stime <Nrf
302
Dtime <Nrf
303
Pdtime <Nrf
303
Mvoltage <Nrf
303
Mtime <Nrf
304
Hlevel <Nrf
304
Htime <Nrf
304
Llevel <Nrf
304
Ltime <Nrf
305
Count <Nrf
305
Ofsvoltage <Nrf
305
Altvoltage <Nrf
305
Readings <Nrf
305
Discard <Nrf
306
Spoints <Nrf
306
Spinterval <Nrf
306
Test Sequence Programming Example
306
UNIT Subsystem
307
Serial Interface
308
Interface Configuration
308
Operating Considerations
308
Interface Error Messages
309
Downloading Commands Using Procomm
309
DDC Programming Language
309
Voltage Source
313
Accuracy Calculations
315
A.1 Accuracy Calculations
315
Calculating Amps Accuracy
315
Calculating Ohms Accuracy
315
Calculating Volts Accuracy
315
A.1.4 Calculating Coulombs Accuracy
316
A.1.5 Calculating Resistance/Resistivity Accuracy and Repeatability Using the Alternating Polarity Method
316
B Interface Function Codes
317
Ascii Character Codes and Ieee-488 Multiline
318
Interface Command Messages
318
DIEEE-488 Bus Overview
321
Introduction
321
Bus Description
321
Bus Lines
322
Bus Commands
323
500 D IEEE-488 Bus Overview
326
Figure D-3 Command Codes
326
Table D-2 Hexadecimal and Decimal Command Codes
326
Table D-3 Typical Addressed Command Sequence
327
Table D-4 Typical Common Command Sequence
327
Table D-5 IEEE Command Groups
328
Table E-2 Coupled Commands
331
Scpi Conformance Information
334
Other manuals for Keithley 6517A
Getting Started Guide
104 pages
4
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Keithley 6517A Specifications
General
Brand
Keithley
Model
6517A
Category
Measuring Instruments
Language
English
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