Keithley 6517A User Manual

OHMS (Normal Method)
TEMPERATURE
ACCURACY
1
COEFFICIENT
5
1
⁄ 2 -DIGIT (10–100% Range) (10–100% Range)
RESO- 18°–28°C (1 Yr.) 0°–18°C & 28°–50°C AUTO AMPS
RANGE LUTION ±(% rdg+counts) ±(% rdg+counts) V SOURCE RANGE
2MΩ 10 Ω 0.125 + 1 0.01 + 1 40 V 200 µA
20 MΩ 100 Ω 0.125 + 1 0.01 + 1 40 V 20 µA
200 MΩ 1kΩ 0.15 + 1 0.015 + 1 40 V 2 µA
2GΩ 10 kΩ 0.225 + 1 0.035 + 1 40 V 200 nA
20 GΩ 100 kΩ 0.225 + 1 0.035 + 1 40 V 20 nA
200 GΩ 1MΩ 0.35 + 1 0.110 + 1 40 V 2 nA
2TΩ 10 MΩ 0.35 + 1 0.110 + 1 400 V 2 nA
20 TΩ 100 MΩ 1.025 + 1 0.105 + 1 400 V 200 pA
200 TΩ 1GΩ 1.15 + 1 0.125 + 1 400 V 20 pA
1
Specifications are for auto V-source ohms, when properly zeroed, 5
1
⁄ 2 -digit, 1 PLC, median filter on, digital filter = 10 readings. If user selectable voltage is required,
use manual mode. Manual mode displays resistance (up to 10
18
Ω) calculated from measured current. Accuracy is equal to accuracy of V-source plus accuracy of
selected Amps range.
PREAMP SETTLING TIME: Add voltage source settling time to preamp settling time in Amps specification..
OHMS (Alternating Polarity Method)
The alternating polarity sequence compensates for the background (offset) currents of the material or device under test. Maximum tolerable offset up to full scale of the
current range used.
Using Keithley 8002A or 8009 fixture
REPEATABILITY: ∆I
BG
× R/V
ALT
+ 0.1% (1σ) (instrument temperature constant ±1°C).
ACCURACY: (V
SRC
Err + I
MEAS
Err × R)/V
ALT
where: ∆I
BG
is a measured, typical background current noise from the sample and fixture.
V
ALT
is the alternating polarity voltage used.
V
SRC
Err is the accuracy (in volts) of the voltage source using V
ALT
as the setting.
I
MEAS
Err is the accuracy (in amps) of the ammeter using V
ALT
/R as the rdg.
VOLTAGE SOURCE
ACCURACY TEMPERATURE
(1 Year) COEFFICIENT
5
1
⁄
2 -DIGIT 18°–28°C 0°–18°C & 28°–50°C
RANGE RESOLUTION ±(% setting + offset) ±(% setting+offset)/°C
100 V 5 mV 0.15 + 10 mV 0.005 + 1 mV
1000 V 50 mV 0.15 +100 mV 0.005 +10 mV
MAXIMUM OUTPUT CURRENT:
±10mA; active current limit at <11.5mA for 100V range.
±1mA; active current limit at <1.15mA for 1000V range.
SETTLING TIME: <8ms to rated accuracy for 100V range.
<50ms to rated accuracy for 1000V range.
NOISE: <150µV p-p from 0.1Hz to 10Hz for 100V range.
<1.5mV p-p from 0.1Hz to 10Hz for 1000V range.
TEMPERATURE (THERMOCOUPLE)
ACCURACY (1 Year)
1
THERMOCOUPLE 18°–28°C
TYPE RANGE ±(% rdg + °C)
K –25°C to 150°C ± (0.3% + 1.5°C)
1
Excluding probe errors, T
CAL
± 5°C, 1 PLC integration time.
HUMIDITY
ACCURACY (1 Year)
1
RANGE 18°–28°C, ±(% rdg + % RH)
0–100% ± (0.3% +0.5)
1
Humidity probe accuracy must be added. This is ±3% RH, for Model
6517RH, up to 65°C probe environment, not to exceed 85°C.
Specifications A-3

Keithley 6517A Specifications

General

Brand	Keithley
Model	6517A
Category	Measuring Instruments
Language	English