Setup & Operation 2. Specifications
30 G3 Rev.14
*1: In the case of PTP command.
Maximum operating speed for CP command is 2000 mm/s on horizontal plane.
*2: In the case where the center of gravity is at the center of Joint #4.
If the center of gravity is not at the center of Joint #4, set the parameter using Inertia command.
*3: The exhaust system in the Cleanroom-model Manipulator draws air from the base interior and arm cover
interior together.
A crack or other opening in the base unit can cause loss of negative air pressure in the outer part of the
arm, which can cause increased dust emission.
Do not remove the maintenance cover on the front of the base.
Seal the exhaust port and the exhaust tube with vinyl tape so that the joint is airtight.
If the exhaust flow is not sufficient, dust particle emission may exceed the specified maximum level.
Cleanliness level : Class ISO 3 (ISO14644-1)
Amount of Dust (0.1 µm diameter or larger) in 28317 cm
3
(1cft) sample-air around the
center of the motion rang: 10 particles or less.
Exhaust System : Exhaust port diameter : Inner diameter: ø12 mm / Outer diameter: ø16 mm
Exhaust tube : Polyurethane tube
Outer diameter: ø12 mm (Inner diameter:ø8 mm) or
Inner diameter ø16mm or larger
Recommended exhaust flow rate : approx. 1000 cm
3
/s (Normal)
ESD specification uses resin materials with antistatic treatment. This model controls adhesion of dust
due to electrification.
*4: Conditions of Manipulator during measurement as follows:
Operating conditions : Under rated load, 4-joints simultaneous motion, maximum speed, maximum
acceleration, and duty 50%.
Measurement point : Rear of the Manipulator, 1000 mm apart from the motion range, 50 mm above
the base-installed surface.
*5: For delivery up until January 2017, there are systems in combination of G series and RC620.
*6: In general use, Accel setting 100 is the optimum setting that maintains the balance of acceleration and
vibration when positioning. Although values larger than 100 can be set to Accel, it is recommended to
minimize the use of large values to necessary motions since operating the manipulator continuously with
the large Accel setting may shorten the product life remarkably.
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