FX-1/FX-1R Maintenance Manual
DANGER
To prevent any trouble caused by accidental machine start, always
shut-down the power before starting the maintenance and
adjustment work.
[6] CAL BLOCK
6-1. Replacing the CAL Block Board Assembly
(1) Disconnect two bundled cables c from the CAL board.
(2) Disconnect the φ4-air tube from the elbow union of the ejector unit.
(3) Remove the hexagon socket head cap bolts d (two locations) on the top surface of the CAL
plate to detach the CAL side cover e.
(4) Remove the SEMS cap bolts f (two locations) to detach the CAL board from the CAL side
cover.
(5) After the board has been replaced, reassemble the components in the reverse order.
6-1
e
f
d
c
Rev. 2.00
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