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Keithley
Measuring Instruments
6220
Keithley 6220 User Manual
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E
Applications
Appendix topics
Calibration source
,
page
E-2
Resistivity measurements
,
page
E-3
Diode characterization
,
page
E-4
T
ransistor characterization
,
page
E-5
Exter
nal user-supplie
d filter
,
page
E-7
Compliance ov
ershoot pre
vention
,
page
E-11
Test Equipment Depot - 800.517.8431 - 99 Washington Street Melrose, MA 02176 - TestEquipmentDepot.com
433
435
Table of Contents
Default Chapter
7
Table of Contents
7
List of Illustrations
17
List of Tables
21
1 Getting Started
26
Introduction
26
Capabilities and Features
26
Organization of Manual Sections
26
General Information
27
Warranty Information
27
Contact Information
27
Safety Symbols and Terms
27
Unpacking and Inspection
28
Options and Accessories
29
User's Manual
31
Reference Manual
31
Additional References
31
Front and Rear Panel Familiarization
31
Front Panel Summaries
31
Rear Panel Summaries
31
Getting Started
31
Figure 1-2 Model 622X Rear Panel
35
Heat Sink and Cooling Vents
36
Power-Up
38
Line Power Connection
38
Power-Up Sequence
39
Beeper and Keyclick
40
Source Preset
41
Disabling the Front Panel
41
Menus
42
CONFIG Menus
42
Direct Access Menus
43
Editing Controls
44
Source and Compliance Editing
44
Menu Navigation
44
Figure 1-3 Menu Editing Keys
45
Password
46
Interface Selection
46
GPIB and Language
47
Ethernet (Model 6221 Only)
47
Error and Status Messages
48
Default Settings
48
Front Panel Setups
48
Remote Operation Setups
49
SCPI Programming
53
Optional Command Words
53
Query Commands
53
2 Output Connections
55
Figure 2-16 Banana Jack Guard Connections
55
Figure 2-17 Floating Current Source Connections
55
Output Connectors
56
Triax Connector
56
Ground Points
57
LO and GUARD Banana Jacks
57
Interlock
58
Output Configurations
59
Figure 2-4 Output Configurations - Triax Inner Shield Connected to Output Low
60
Figure 2-5 Output Configurations - Triax Inner Shield Connected to Cable Guard
60
Triax Inner Shield
61
Triax Output Low
61
Guards
62
Guard Overview
62
Triax Cable Guard
63
Banana Jack Guard
66
Floating the Current Source
67
Connections to DUT
69
Supplied Triax Cable
69
Basic Connections
69
Shields and Guarding
70
Figure 2-11 Basic Connections to DUT
70
Figure 2-12 Noise Shield
71
Figure 2-13 Safety Shield
71
Banana Jack Guard Connections
73
Floating Current Source Connections
73
Using a Test Fixture
74
Custom-Built Test Fixture
74
Figure 2-18 Custom-Built Test Fixture
75
600 DC Current Source Operation
80
Current Source Output Capabilities
80
Source Ranges
80
Compliance
81
Output Power (Source or Sink)
81
Output Response
83
Setting Source and Compliance
87
Source and Compliance Editing
87
Autorange
91
Source Preset
91
Sourcing Current
92
Remote Programming - Source Output Commands
94
3 DC Current Source Operation
95
Table 3-2 DC Output Commands
95
Programming Example
95
4 Sweeps
97
Overview
98
Section Overview
98
Sweep Overview
98
Sweep Characteristics
100
Linear Staircase Sweeps
100
Logarithmic Staircase Sweeps
101
Figure 4-3 Logarithmic Staircase Sweep (Example 5-Point Sweep from 1Ma to 10Ma)
101
Custom Sweeps
102
Setting Sweep Parameters
104
Front Panel Sweep Operation
106
Using the Sweep Configuration Menu
106
Performing a Linear Staircase Sweep
107
Performing a Log Staircase Sweep
108
Performing a Custom Sweep
109
Remote Sweep Operation
110
Figure 4-2 Linear Staircase Sweep
110
Table 4-3 Sweep Example Parameters
110
Running a Linear Staircase Sweep
111
Running a Log Staircase Sweep
112
Running a Custom Sweep
113
SCPI Commands - Sweeps
114
Table 4-4 Staircase Sweep Commands (Linear and Logarithmic)
114
Coupled Sweep Commands
118
Sweep Status Model Events
119
5 Delta, Pulse Delta, and Differential Conductance
121
Part 1
121
Overview
122
Section Overview
122
Operation Overview
122
Test Systems
124
Keithley Instrumentation Requirements
124
System Configurations
124
System Connections
126
DUT Test Connections
128
Configuring Communications
130
Arming Process
131
Interlock
133
Data Flow and Read Commands
133
Data Flow
133
Read Commands
135
Measurement Units
136
Volts, Ohms, Power or Conductance
136
Setting Measurement Units
137
Display Readings
137
Error and Status Messages
138
Delta
140
Basic Measurement Process
140
Model 622X Measurement Process
141
Configuration Settings
144
Arming Process
144
Triggering Sequence
145
Operation
147
Setup Commands
150
Table 5-3 Delta Commands
151
Pulse Delta
152
Model 6221 Measurement Process
152
Pulse Delta Outputs
155
Figure 5-10 Pulse Timing
156
Configuration Settings
159
Arming Process
162
Triggering Sequence
163
Operation
164
Figure 5-12 Pulse Delta Triggering Sequence (Two Lows Measured)
164
Setup Commands
169
Table 5-4 Pulse Delta Commands
169
Differential Conductance
171
Basic Measurement Process
171
Model 622X Measurement Process
171
Figure 5-14 Differential Conductance Measurement Process
172
Configuration Settings
175
Arming Process
176
Triggering Sequence
178
Operation
179
Figure 5-15 Differential Conductance Triggering Sequence
179
Setup Commands
184
Table 5-5 Differential Conductance Commands
184
6 Averaging Filter, Math, and Buffer
187
Averaging Filter
188
Averaging Filter Characteristics
188
Figure 6-2 Filter Window
193
Filter Setup and Control
194
Remote Programming - Averaging Filter
194
Math
195
MX+B and M/X+B (Reciprocal)
195
Configuring and Controlling MX+B and M/X+B
195
Remote Programming - Math
196
Table 6-3 Math Commands
196
Buffer
197
Buffer Characteristics
198
Storing Readings
200
Recall
200
Remote Programming - Buffer
201
Figure 6-3 Buffer Recall
201
Table 6-4 Buffer Commands
202
7 Wave Functions (6221 Only)
206
Overview
206
Section Overview
206
Wave Function Overview
206
Wave Function Characteristics
207
Table 7-1 Wave Function Characteristics
207
Setting Waveform Parameters
208
Amplitude
209
Ranging
209
Frequency
210
Offset
210
Amplitude Units
211
Duty Cycle
211
Figure 7-1 Offset Example
211
Figure 7-2 Duty Cycle
212
Figure 7-3 Phase Marker
213
Phase Marker
213
Arbitrary Waveforms
214
Duration
214
Using the External Low Jitter Trigger Mode
214
Figure 7-4 Waveform Triggering
215
Front Panel Wave Function Operation
218
Using the Wave Function Menu
218
Generating a Sine Wave
220
Generating a Square Wave
221
Generating a Ramp Waveform
222
Generating an Arbitrary Waveform
223
Using the External Trigger Mode
224
Remote Wave Function Operation
225
Table 7-3 Waveform Example Parameters
225
Programming Sine Waves
226
Programming Square Waves
227
Programming Ramp Waveforms
228
Programming Arbitrary Waveforms
229
Programming an Externally Triggered Waveform
230
SCPI Commands - Wave Functions
231
Table 7-4 Waveform Function Commands
231
8 Triggering
238
Trigger Models
238
Front Panel Trigger Model
238
Remote Trigger Model
239
Trigger Model Operation
240
Front Panel Trigger Operation
243
Using the Trigger Configuration Menu
243
Configuring Triggering
244
Remote Trigger Operation
245
Programming Triggering
245
SCPI Commands - Triggering
246
Table 8-2 Trigger Commands
246
External Triggering
249
External Trigger Connector
249
Input Trigger Requirements
249
Figure 8-4 Trigger Link Connection Operation
249
Output Trigger Specifications
250
External Trigger Example
251
Figure 8-7 DUT Test System
251
Limit Test
256
Overview
256
Programming Limit Testing
256
SCPI Commands - Limit Testing
257
Table 9-1 Limit Test Commands
257
9 Limit Test and Digital I/O
259
Digital I/O Port
259
Digital I/O Connector
259
+5V Output
259
Figure 9-2 Digital I/O Port
259
SOT Line
260
Simplified Schematic
260
Sink Mode - Controlling External Devices
260
Source Mode - Logic Control
262
Setting Digital Output Lines
262
Figure 9-5 NAND Gate Control
262
SCPI Commands - Force Digital I/O Pattern
263
Table 9-3 Digital I/O Commands
263
10 Remote Operations
266
Selecting and Configuring an Interface
266
Interfaces
266
Languages
267
Interface Selection and Configuration
267
Table 10-1 Communications Menu
268
Table 10-2 Remote Interface Configuration Commands
271
Programming Syntax
276
Command Words
276
Program Messages
279
Response Messages
281
GPIB Interface Reference
283
GPIB Bus Standards
283
GPIB Bus Connections
283
Figure 10-1 IEEE-488 Connector
283
Figure 10-2 Multi-Unit Connections
284
Primary Address
285
General IEEE-488 Bus Commands
286
Table 10-4 General Bus Commands
286
Front Panel GPIB Operation
288
RS-232 Interface Reference
289
Sending and Receiving Data
289
RS-232 Settings
289
RS-232 Connections
291
Table 10-6 PC Serial Port Pinout
292
Ethernet Interface Reference
293
Ethernet Standards
293
Typical Ethernet Systems
293
Ethernet Connections
295
Ethernet Settings
297
Table 10-7 Network Classes
298
Using the Example Software
299
Figure 10-13 Typical Virtual Front Panel
302
Figure 11-3 Status Byte and Service Request
303
11 Status Structure
304
Overview
304
Clearing Registers and Queues
306
Programming and Reading Registers
307
Programming Enable Registers
307
Figure 11-2 16-Bit Status Register
307
Reading Registers
308
Status Byte and Service Request (SRQ)
309
Status Byte Register
309
Service Request Enable Register
310
Serial Polling and SRQ
311
Status Byte and Service Request Commands
311
Status Register Sets
312
Register Bit Descriptions
312
Figure 11-4 Standard Event Status
313
Figure 11-5 Operation Event Status
316
Figure 11-6 Measurement Event Status
318
Figure 11-7 Questionable Event Status
319
Table 11-4 Common and SCPI Commands - Condition Registers
319
Queues
322
Output Queue
322
Error Queue
322
12 Common Commands
325
13 Display, Format, and System Key-Press Codes
331
Display Subsystem
332
Table 13-1 Display Commands
332
Format Subsystem
334
Format <Type>[,<Length>]
334
Table 13-2 Format Commands
334
Figure 13-1 ASCII Data Format
335
Figure 13-2 IEEE-754 Data Formats
336
Format:elements <Item List
337
Format:border <Name
338
System Key-Press Codes
339
System:key <Nrf
339
Figure 13-3 Model 6220 Key-Press Codes
340
Figure 13-4 Model 6221 Key-Press Codes
341
Table 14-1 Calculate Command Summary
343
Table 14-2 Display Command Summary
343
Table 14-3 Format Command Summary
343
Table 14-4 Output Command Summary
343
Table 14-6 Source Command Summary
343
Table 14-7 Status Command Summary
343
Table 14-8 System Command Summary
343
14 SCPI Reference Tables
344
General Notes
344
Table 14-5 Sense Command Summary
349
Table 14-9 Trace Command Summary
358
Table 14-10 Trigger Command Summary
359
Table 14-11 Units Command Summary
360
15 KI-220 Language
361
Introduction
361
Notes
362
Introduction
362
Table 15-1 DDC Emulation Commands
362
Test Requirements
369
Environmental Conditions
369
Warm-Up Period
369
Line Power
369
Recommended Test Equipment
370
Test Equipment Connections
370
Calculating Test Limits
370
Example Limit Calculation
370
Restoring Factory Defaults
371
Test Summary and Considerations
371
Test Summary
371
Test Considerations
371
Verification Procedures
372
DC Current Output Accuracy
372
Compliance Accuracy
374
Waveform Function Accuracy
375
17 Calibration
377
Introduction
378
Calibration Requirements
379
Environmental Conditions
379
Warm-Up Period
379
Line Power
379
Recommended Calibration Equipment
380
Calibration Equipment Connections
380
Restoring Factory Defaults
380
Calibration Summary and Considerations
381
Calibration Summary
381
Calibration Considerations
381
Calibration Procedures
381
Front Panel Calibration
381
Table 17-2 Calibration Menu
382
Remote Calibration
390
Table 17-4 Remote Current Calibration Summary
392
SCPI Commands - Calibration
396
Table 17-5 Calibration Commands
396
Table 17-6 CAL:PROT:SENS Command Parameter Ranges
398
Table 17-7 CAL:PROT:SOUR Command Parameter Ranges
398
Calibration Dates, Count, and Password
400
Viewing Calibration Dates and Count
400
Changing the Calibration Password
400
Specifications
403
Figure 2-3 INTERLOCK
407
Error and Status Messages
408
Table B-1 Status and Error Messages
409
Introduction
415
IEEE-488 Bus Overview
415
Bus Description
416
Bus Lines
417
Data Lines
418
Bus Management Lines
418
Handshake Lines
418
Bus Commands
419
Uniline Commands
419
Table C-1 IEEE-488 Bus Command Summary
420
Table C-2 Command Codes
421
Universal Multiline Commands
422
Addressed Multiline Commands
423
Address Commands
423
Unaddress Commands
424
Common Commands
424
SCPI Commands
424
Command Codes
425
Typical Command Sequences
425
Table C-3 Hexadecimal and Decimal Command Codes
425
Table C-4 Typical Bus Sequence
426
Table C-5 Typical Addressed Command Sequence
426
IEEE Command Groups
427
Table C-6 IEEE Command Groups
427
100 C IEEE-488 Bus Overview
420
Interface Function Codes
428
IEEE-488 and SCPI Conformance Information
430
Introduction
431
500 D IEEE-488 and SCPI Conformance Information
432
Table D-2 Coupled Commands
432
Calibration Source
435
Resistivity Measurements
436
Diode Characterization
437
Transistor Characterization
438
External User-Supplied Filter
440
Typical Filter Circuits
441
Filter Circuit Considerations
442
Suggested Filter Circuit Components
443
Compliance Overshoot Prevention
444
Calculating Overshoot
444
Effect of Compliance Setpoint on Settling Times
445
Preventing Compliance Overshoot
445
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Keithley 6220 Specifications
General
Brand
Keithley
Model
6220
Category
Measuring Instruments
Language
English
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