Series 613 TROUBLE SHOOTING
984360EC Edition 12.08.2022 125/
7.3 Troubleshooting List
Failure Check Action
Display does not light up
- 24 V power supply - Connect valve to power supply according to
‘Power, ground and sensor connection’ and make
sure that power supply is working.
Remote operation does not work - Local operation via service port
active
- Switch to remote or locked operation
Refer to ‘Remote and local operation’
- Safety mode active
Check for S on display
- Check ‘Drive Power Enable Switch’
Refer to ‘Power, ground and sensor connection’
- Interlock mode active
Check for I on display
- Check Digital Input
Refer to ‘Power connector IO’ ‘Digital Input’
POSITION CONTROL does not work - Safety mode active
Check for S on display
- Check ‘Drive Power Enable Switch’
Refer to ‘Power, ground and sensor connection’
- Interlock mode active
Check for I on display
- Check Digital Input
Refer to ‘Power connector IO’ ‘Digital Input’
- POSITION CONTROL selected,
check for A on display?
- Select POSITION CONTROL mode.
Refer to ‘Control Mode’ in ‘EtherCAT’ interface
Pressure reading is wrong
Pressure reading is negative
- Sensor connection - Refer to ‘Power, ground and sensor connection’
- ZERO done? - Perform ZERO when base pressure is reached.
Refer to ‘Pressure Sensor’
- Does sensor power supply
provide enough power for
sensor(s)?
- Verify sensor supply voltage.
ZERO does not work - ZERO disabled? - Enable ZERO.
Refer to ‘Pressure Sensor’ ‘Zero Adjust’
- Sensor voltage shifting?
- Wait until sensor does not shift any more before
Performing ZERO.
Pressure is not ‘0’ after ZERO - System pumped to base
pressure?
- OPEN VALVE and bring chamber to base pressure
before performing ZERO.
- Sensor offset voltage exceeds
±1.4V
- Adjust the offset direct at the sensor
- Check function of the sensor.
PRESSURE CONTROL does not
work
- PRESSURE CONTROL
selected, check for P on
display?
- Select PRESSURE CONTROL mode.
Refer to ‘Control Mode’ in ‘EtherCAT’ interface
- LEARN done?
- Perform LEARN. Refer to
‘Pressure control’ ‘Adaptive algorithm’ ‘Learn’
- Sensor signal ok? - Refer to ‘Pressure Sensor’
- Pressure control setup done - Refer to ‘Pressure control’
PRESSURE CONTROL not optimal - LEARN successfully done? - Perform LEARN. Check ‘Status’ and ‘Warning Info’ in
‘Pressure control’ ‘Adaptive algorithm’ ‘Learn’
- ZERO performed before
LEARN?
- Perform ZERO then repeat LEARN.
Refer to ‘Pressure Sensor’ ‘Zero Adjust’
- Was gas flow stable during
LEARN?
- Repeat LEARN with stable gas flow. Refer to
‘Pressure control’ ‘Adaptive algorithm’ ‘Learn’
- Tuning done?
- Tune valve for application.
Refer to the tuning sections in ‘Pressure Control’
- Is sensor range suited for
application?
- Use a sensor with suitable range (controlled pressure
should be >3% and < 98% of sensor full scale).
- Noise on sensor signal? - Make sure a shielded sensor cable is used.