Series 613 OPERATION
984360EC Edition 12.08.2022 91/
6.3.2 Control algorithm
6.3.2.1 Overview
This is the most dynamic control algorithm. Before using adaptive control algorithm, a
special procedure called “learn” must be executed first (see chapter below). The valve will
observe the behavior of the vacuum system by moving the valve to different positions.
During the learn procedure the valve performs an internal parameter estimation
correspondent to the vacuum system.
Note: Adaptive control algorithm requires a linear sensor signal. If a logarithmic sensor
is used the signal has to be linearized or PI algorithm has to be used.
PI This is a solid algorithm for pressure control. The performance will be behind the adaptive
control algorithm. But if the condition varies a lot, it’s possible that the adaptive control
algorithm does not work properly so the PI algorithm provides the best result.
Soft
Pump/Vent
Is a modified PI control algorithm to pump down from atmospheric pressure or vent to
atmospheric pressure. This control algorithm has been optimized to starts very carefully
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