INSTALLATION Series
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Edition 12.08.2022 984360EC
5.13 Pressure Sensor
5.13.1 Mechanical connection requirements
Fast and accurate pressure control requires a fast sensor response. Sensor response time: < 50ms.
The sensor is usually connected to the chamber by a pipe. The line must be short enough and the
conductance must not be reduced by a too small line diameter or a low conductance shut-off valve,
To maintain that the response time is not degraded by this connection it needs to meet the following
requirements:
•
Inner diameter of connection pipe: > = 10 mm
•
Total length L1 + L2: < = 300 mm
The total conductance value must include all valves and limiting orifices that may also be present.
Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The
sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields
may introduce noise to sensor output and should be avoided or shielded.
Isolation Valve
(optional)
Process
Chamber
L1 + L2 < = 300 mm
L1
min. 10 mm
10 mm
Pressure Sensor
L2
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