Series 613 INSTALLATION
984360EC Edition 12.08.2022 15/
5.3 Installation into the system
WARNING
Valve opening
Risk of serious injury.
Human body parts must be kept out of
the valve opening and away from moving parts.
Do not connect the controller to power before the valve is installed complete into the
system.
NOTICE
Sealing surfaces
Sealing surfaces of valve and vacuum system could be damage in case of incorrect
handling.
Only qualified personal are allowed to install the valve into the vacuum system.
NOTICE
Wrong connection
Wrong connection may result in damage of controller or power supply.
Connect all cables exactly as shown in the following descriptions and schematics.
NOTICE
Burned connector pins (spark)
Connector pins or electronic parts could damage, if plugged and unplugged under
power.
Do not plug or unplug connectors under power.
NOTICE
Contamination
Gate and other parts of the valve must be protected from contamination.
Always wear clean room gloves when handling the valve.
Mount valve to a clean system only.
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