VAT 613 Series User Manual

FEHLER! VERWEISQUE
LLE KONNTE NICHT GEF
UNDEN WERDEN.
Series
613
128/149 Edition 12.08.2022 984360EC
8.2.1 Replacement of shaft feedthrough seals and valve cleaning
8.2.1.1 Required tools
• Allen Wrench 2 mm / 2.5mm
• Allen Wrench 3 mm
• Feeler gauge
• Clean room wipes, isopropyl alcohol
• Vacuum grease
Description
Required tool
1. Vent vacuum system on both sides of the valve.
2. Make sure the valve is in closed position
3. Disconnect electrical POWER connector at valve and remove valve from vacuum
system.
Take care not to damage sealing surface! Do not move the plate by hands when
control and actuating unit is installed.
4. Unfasten clamp coupling
Allen Wrench:
steel coupling
2.5 mm
5. Unfasten the 2 (DN-25-50) or 4 (DN 63-320)
connection bolts and separate both parts.
Valve size DN 160 (6”) and bigger require
a shortened wrench. For ordering number
refer to «Spare parts and accessories».
Allen Wrench
3 mm
12 mm

VAT 613 Series Specifications

General

Brand	VAT
Model	613 Series
Category	Control Unit
Language	English