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6517B
Keithley 6517B Reference Manual
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Keithley Instruments
Corporate Headquarters • 28775
Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www
.te
k.com/keithley
12/15
A
Greater Measure of Confidence
497
Table of Contents
Default Chapter
3
Safety Precautions
3
Table of Contents
5
Getting Started
17
Welcome
17
Capabilities and Features Overview
17
Available Options and Accessories
18
Cables and Adapters
19
Case and Rack Mount Kits
20
Probes
20
Scanner Cards
20
Text Fixture
20
Software
20
Manual Addenda
21
Extended Warranty
21
Contact Information
21
CD-ROM Contents
21
General Ratings
22
Unpacking and Inspection
22
Inspection for Damage
22
Shipment Contents
22
Handling Precautions
22
Repacking for Shipment
23
Getting Started
24
Introduction
24
Front Panel Summary
24
Rear Panel Summary
26
Power-Up
28
Line Power Connection
28
Line Fuse Replacement
28
Power-Up Sequence
29
Display
31
Exponent Mode (Engineering or Scientific)
31
Information Messages
31
Range Messages
32
Status and Error Messages
34
Multiple Displays
37
Navigating Menus
40
Menu Types
40
Navigation Rules
40
Menu
41
Savesetup
42
Test
49
Limits
49
Status-Msg
49
General
50
Connections
54
Introduction
54
Electrometer Input Connector
54
Input Configurations
55
Maximum Input Levels
55
Input Protection
56
Connection Methods
57
High-Resistance Meter Connections
57
Voltage Source Output Connections
58
V-Source Probes and Cables
59
Low-Noise Cables, Shielding, and Guarding
59
Low-Noise Input Cables
60
Shielding and Guarding
60
Floating Circuits
62
Floating Measurements
63
Floating Voltage Source
63
Test Fixtures
64
Keithley Instruments Model 8009 Test Fixture
64
Custom Built Test Fixtures
65
Basic Measurements
69
Introduction
69
Voltage Measurements
69
Basic Measurement Procedure
70
Volts Configuration
72
Voltage Measurement Considerations
74
Loading Effects
74
Cable Leakage Resistance
74
Current Measurements
77
Basic Measurement Procedure
78
Amps Configuration
80
Current Measurement Considerations
81
Voltage Burden
82
Resistance and Resistivity Measurements
86
Auto V-Source
86
Ohms Ranges
87
Resistance Measurements
88
Resistivity Measurements
90
Ohms Configuration
95
Ohms Measurement Considerations
98
Charge Measurements (Q)
99
Basic Measurement Procedure
99
Auto Discharge
99
Coulombs Configuration
101
Charge Measurement Considerations
102
External Voltage Source
102
Zero Check Hop and Auto Discharge Hop
103
Other Measurement Considerations
103
Ground Loops
103
Triboelectric Effects
104
Piezoelectric and Stored Charge Effects
104
Electrochemical Effects
105
Humidity
105
Light
105
Electrostatic Interference
105
Magnetic Fields
106
Electromagnetic Interference (EMI)
106
Relative Humidity and External Temperature Readings
107
Measurement Options
108
Introduction
108
Voltage Source
108
V-Source Configuration
109
Sourcing Options
109
Setting Voltage Source Value
111
Voltage and Current Limit
112
Interlock and Test Fixtures
113
Operate
114
Analog Outputs
114
Analog Output
115
Preamp out
116
Using External Feedback
117
Electrometer Input Circuitry
118
Shielded Fixture Construction
120
External Feedback Procedure
121
Non-Standard Coulombs Ranges
121
Logarithmic Currents
122
Non-Decade Current Gains
124
Range and Resolution
124
Measurement Range
124
Display Resolution
125
Zero Check, Relative, and Zero Correct
126
Zero Check
126
Relative (REL)
127
Configuring Rel
127
Enabling Rel
127
Multiple Display of Rel
128
Zero Correct
128
Test Sequences
129
Introduction
129
Test Descriptions
129
Diode Leakage Current Test
130
Capacitor Leakage Current Test
132
Cable Insulation Resistance Test
133
Resistor Voltage Coefficient Test
133
Standard Method Resistivity Tests
134
Alternating Polarity Resistance/Resistivity Test
135
Surface Insulation Resistance (SIR) Test
137
Sweep Tests (Square Wave and Staircase)
138
Configuring Test Sequences
140
Configure Sequence Menu
140
Menu Sections
142
Running the Selected Test
143
Triggering
144
Trigger Configuration Menu
145
Trigger Models
146
Basic Trigger Model
147
Trigger Mode
147
Advanced Trigger Model
149
Trigger Model Layers
150
Trigger Configuration
152
Basic Trigger Configuration
152
Advanced Trigger Configuration
152
Halting Triggers
159
External Triggering
159
Trigger Link Connector
160
Asynchronous Operation
160
Semi-Synchronous Operation
165
Buffer (Data Store)
169
Introduction
169
Buffer Overview
169
Maximum Readings
169
Data Elements
169
Configuring Data Storage
171
Data Store Configuration Menu
171
Storing and Recalling Readings
174
Buffer Multiple Displays
175
Filters and Math
177
Introduction
177
Filters
177
Digital Filters
178
Response Time
178
Median Filter
179
Configuring the Filters
182
Math
183
Polynomial
184
Percent
184
Percent Deviation
184
Deviation
185
Ratio
185
Logarithmic
185
Selecting and Configuring Math
186
Math Multiple Display
187
Limits, Digital I/O, and Scanning
188
Introduction
188
Limits
188
Setting Limits
190
Strobe Control
191
Pass Pattern
191
Limits Example
192
Digital I/O
193
Digital I/O Menu
193
Digital I/O Port
194
External Voltage Supply
195
Scanning
197
Internal Scanning
197
External Scanning
198
Remote Operations
200
Introduction
200
Standards
200
Serial Port
200
Connections
200
IEEE-488 Bus Connections
201
Interface Connections
202
Selecting Interface Parameters
203
Communication Menu
203
GPIB Primary Address Selection
206
General Bus Commands
206
REN (Remote Enable)
207
IFC (Interface Clear)
207
LLO (Local Lockout)
207
GTL (Go to Local)
207
DCL (Device Clear)
207
SDC (Selective Device Clear)
207
GET (Group Execute Trigger)
208
SPE, SPD (Serial Polling)
208
IEEE-488 Front Panel Operation
208
Error and Status Messages
208
IEEE-488 Status Indicators
208
LOCAL Key
209
Programming Syntax
209
Command Words
209
Parameter Types
210
Program Messages
212
Response Messages
214
Message Exchange Protocol
214
IEEE-488 Trigger Model
215
Idle and Initiate
216
Trigger Model Layers
216
Serial Interface
219
Interface Configuration
220
Operating Considerations
220
Data Format
221
Error Messages
222
Common Commands
223
Introduction
223
Common Command Summary
224
Common Command Descriptions
225
CLS (Clear Status)
225
ESE <Nrf> (Event Enable), *ESE? (Event Enable Query)
226
ESR? (Event Status Register Query)
227
IDN? (Identification Query)
229
OPC (Operation Complete)
230
OPC? (Operation Complete Query)
231
OPT? (Option Identification Query)
232
RCL (Recall)
232
RST (Reset the Model 6517B)
232
SAV (Save the Current Setup in Memory)
233
SRE <Nrf> (Service Request Enable), *SRE? (Service Request Enable Query)
233
STB? (Status Byte Query)
235
TRG (Trigger)
236
TST? (Self-Test Query)
237
WAI (Wait-To-Continue)
237
Status Structure
238
Introduction
238
Status Register Sets
238
Standard Event Status Registers
240
Operation Event Status Registers
240
Condition Registers
245
Transition Filters
246
Event Registers
246
Enable Registers
247
Queues
247
Output Queue
247
Error Queue
248
Status Byte and Service Request (SRQ)
248
Status Byte Register
249
Service Request Enable Register
250
Serial Poll and SRQ
251
SCPI Command Reference
252
Signal-Oriented Measurement Commands
252
Fetch
253
Configure:<Function
254
Read
255
Measure[:<Function>]
256
SCPI Command Summary
257
General Notes
257
Calculate Command Summary
258
Display Command Summary
260
Format Command Summary
261
Output Command Summary
262
Route Command Summary
262
Sense Command Summary
264
Source Command Summary
271
Status Command Summary
272
System Command Summary
274
Trace Command Summary
276
Trigger Command Summary
277
Tsequence Command Summary
280
UNIT Command Summary
283
SCPI Command Subsystems
283
Calculate Subsystem
283
Calculate[1]
283
Format <Name
284
Kmath Commands
284
Ma0Factor <Nrf
284
Ma1Factor <Nrf
285
Ma2Factor <Nrf
285
Percent <Nrf
285
Reference <Nrf
286
State <B
286
DATA Commands
286
[:Latest]
286
Fresh
287
Immediate
287
Calculate2
287
Format <Name
288
State <B
288
Immediate
289
Data
289
Calculate3
289
[:DATA] <N
290
Source <Nrf
291
State <B
292
Fail
292
Clear[:Immediate]
293
AUTO <B
293
Pass:source <Nrf
294
Climits:fail
295
Bstrobe:state <B
295
Immediate
296
Display Subsystem
296
TEXT Commands
297
DATA <A
297
State <B
298
Attributes
299
Data
299
Cndisplay
300
Smessage <B
300
Enable <B
301
Format Subsystem
301
[:DATA] <Type>[,Length]
302
Elements <Item List
304
Border <Name
306
Output Subsystems
306
Output1 Subsystem
307
[:State] <B
307
Output2 Subsystem
307
Lsense <Name
307
Sense1 Subsystem
308
Function Command
308
Function <Name
308
DATA Commands
308
[:Latest]
309
Fresh
309
Aperture <N
310
AUTO <B>|Once
311
Nplcycles <N
312
AUTO <B>|Once
313
Range Commands
313
[:Upper] <N
314
AUTO <B>|Once *3
315
Ulimit <N
315
Llimit <N
316
Lgroup <Name
317
Ohms Ranges
317
[:Upper] <N
317
AUTO <B>|Once
318
Ulimit <N
318
Llimit <N
319
Vsource:range <N
320
Vsource[:Amplitude] <N
321
Vsource:operate <B
321
Reference <N
322
State <B
323
Acquire
323
Ireference <B
324
Digits <N
325
AUTO <B>|Once
326
Average Commands
326
TYPE <Name
327
Tcontrol <Name
327
Count <N
328
[:State] <B
328
Ntolerance <N
329
[:State] <B
330
RANK <Nrf
331
Median Commands
331
[:State] <B
332
RANK <Nrf
333
Damping <B
333
Guard <B
334
Adischarge Commands
334
[:State] <B
334
Level <Nrf
335
Xfeedback <B
335
Vscontrol <Name
336
Mselect <Name
336
Resistivity Commands
336
Fselect <Name
337
Sthickness <Nrf
337
M8009:Rswitch
338
USER Commands
338
Rselect <Name
338
Ksurface <Nrf
339
Kvolume <Nrf
339
Source Subsystem
339
Digital Output Commands
340
[:Level] <B
340
V-Source Configuration Commands
341
Voltage Commands
341
[:Level][:Immediate][:Amplitude] <N
341
Range <N
342
Limit[:Amplitude] <N
342
Limit:state <B
343
Mconnect <B
343
Current Commands
344
Rlimit:state <B
344
Limit[:State]
344
Route Subsystem
344
Close <List
345
State
345
OPEN <List
346
Open:all
346
SCAN Commands
347
[:Internal] <List
347
External <N
348
Lselect <Name
348
Stime <N
349
Smethod <Name
349
Vslimit <B
350
Status Subsystem
350
[:Event]
351
Enable <Nrf
357
Ptransition <Nrf
360
Ntransition <Nrf
367
Condition
369
Preset
370
Queue Commands
371
[:Next]
371
Enable <List
372
Disable <List
373
Clear
373
System Subsystem
373
Preset
373
Posetup <Name
374
Version
374
Error
375
Lsync:state <B
375
KEY <Nrf
376
Clear
377
DATE <Yr>, <Mo>, <Day
378
TIME <Hr>, <Min>, <Sec
378
Tstamp Commands
378
TYPE <Name
379
Relative:reset
379
Rnumber:reset
379
Zero Check and Zero Correct Commands
380
Zcheck <B
380
Zcorrect[:State] <B
381
Zcorrect:acquire
381
A/D Controls
382
Arspeed <Name
382
Tscontrol <B
382
Hscontrol <B
383
Hlcontrol <B
383
Local
384
Remote
384
Llockout <B
385
Basic Trigger Commands
385
[:Execute]
385
MODE <Name
386
Source <Name
386
Timer <N
387
Interlock
387
Trace Subsystem
387
Trace|:Data
388
Clear
388
Free
388
Points <N
389
AUTO <B
390
Actual
390
FEED Commands
391
[Percent] <N
391
Readings <B
392
Source <Name
392
Control <Name
393
Data
393
Last
394
Tstamp:format <Name
394
Elements <Item List
395
Trigger Subsystem
395
Initiate Commands
396
[:Immediate]
396
Continuous <B
396
Poflag <Name
397
Abort
397
Immediate
398
COUNT <N
398
Delay <N
399
Source <Name
400
Timer <N
401
Signal
401
Tconfigure Commands
402
Protocol <Name
402
Direction <Name
403
Asynchronous Commands
404
Iline <Nrf
404
Oline <Nrf
404
Ssynchronous:line <Nrf
405
Rtclock Commands
405
DATE <Yr>, <Mo>, <Day
405
TIME <Hr>, <Min>, <Sec
406
Tsequence Subsystem
406
General Test Sequence Commands
407
Arm
407
Abort
407
TYPE <Name
408
Tsource <Name
409
Tline <Nrf
410
Start <Nrf
410
STOP <Nrf
411
STEP <Nrf
411
Mdelay <Nrf
412
Svoltage <Nrf
413
Stime <Nrf
414
Dtime <Nrf
415
Pdtime <Nrf
415
Mvoltage <Nrf
416
Mtime <Nrf
417
Hlevel <Nrf
418
Htime <Nrf
418
Llevel <Nrf
419
Ltime <Nrf
419
Count <Nrf
420
Ofsvoltage <Nrf
420
Altvoltage <Nrf
420
Readings <Nrf
421
Discard <Nrf
421
Spoints <Nrf
422
Spinterval <Nrf
422
UNIT Subsystem
423
Temperature <Name
423
Calibration Procedure
424
Introduction
424
Environmental Conditions
424
Warm-Up Period
425
Recommended Calibration Equipment
425
Comprehensive Calibration Procedure
425
Restoring Factory Defaults
425
Unlocking Calibration
425
Voltage Offset Calibration
425
Current Offset Calibration
428
Current Ranges Calibration
430
Coulombs Ranges Calibration
433
Voltage Measurement Ranges Calibration
434
Voltage Source Calibration
434
Humidity Calibration
436
Temperature Calibration
436
Set Calibration Dates
436
Save Calibration
436
Lock Calibration
436
Partial Calibration
437
Calibration Command Reference
440
Voltage Offset Calibration Commands
440
Current Offset Calibration Commands
441
Charge Calibration Commands
442
Current Calibration Commands
443
Voltage Measurement Calibration Commands
444
Voltage Source Calibration Commands
445
Humidity Calibration Commands
445
Temperature Calibration Commands
446
Error Codes
447
Verification Procedure
454
Introduction
454
Equipment Needed for Verification
455
Warmup Time and Environment
455
Considerations
456
Verification Procedures
456
DC Voltage Verification
457
DC Amps Verification
458
Coulombs Verification
461
Voltage Source Verification
463
Temperature Verification
464
Humidity Verification
464
Ohms Verification
465
Instrument Setup
466
Accuracy Calculations
470
Introduction
470
Calculating Volts Accuracy
470
Calculating Amps Accuracy
471
Calculating Ohms Accuracy
471
Calculating Coulombs Accuracy
472
Calculating Resistance/Resistivity Accuracy and Repeatability Using the Alternating Polarity
473
Interface Function Codes
474
Code Summary
476
ASCII Character Codes
476
Introduction
479
IEEE-488 Bus Overview
479
Bus Description
480
Bus Lines
481
Data Lines
481
Bus Management Lines
482
Handshake Lines
483
Bus Commands
484
Uniline Commands
485
Universal Multiline Commands
485
Addressed Multiline Commands
486
Addressed Commands
486
Unaddress Commands
486
Common Commands
486
SCPI Commands
487
Command Codes
488
Typical Command Sequences
490
IEEE Command Groups
490
IEEE-488 Conformance
492
Information
493
SCPI Conformance
497
Introduction
497
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Keithley 6517B Specifications
General
Brand
Keithley
Model
6517B
Category
Measuring Instruments
Language
English
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