1 Features and System Configuration
1 - 10
OMNUC G5-series (Pulse-train Input Type) AC Servomotors and Servo Drives User’s Manual
1-5 Applicable Standards
Note To conform to EMC Directives, the Servomotor and Servo Drive must be installed under the conditions
described in 4-3 Wiring Conforming to EMC Directives on page 4-20.
• Servo Drives conform to the SEMI F47 standard for momentary power interruptions (voltage sag
immunity) for no-load or light-load operation.
• This standard applies to semiconductor manufacturing equipment.
Note 1 It does not apply to Servo Drives with 24 VDC specifications for the control power input.
2 Always perform evaluation testing for SEMI F47 compliance in the actual system.
1-5-1 EC Directives
EC directive Product Applicable standards
Low Voltage
Directive
AC Servo Drives EN61800-5-1
AC Servomotors EN60034-1/-5
EMC Directive AC Servo Drives EN55011 class A group1
IEC61800-3
EN61000-6-2
1-5-2 UL and cUL Standards
Standard Product Applicable standards File number
UL standards AC Servo Drives UL508C E179149
AC Servomotors UL1004-1 E331224
CSA standards AC Servo Drives CSA22.2 No.14 E179149
AC Servomotors CSA22.2 No.100 E331224
1-5-3 SEMI F47