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Model 4200A-SCS Prober and External Instrument Control

Use KCon to add a prober..................................................................................................... 13-14

Clarius project example.................................................................................................... 13-15

Probesites Clarius project example ................................................................................. 13-18

Probesubsites Clarius project example ............................................................................ 13-19

Commands and error symbols ......................................................................................... 13-20

Using an MPI Probe Station................................................................................... 14-1

MPI prober software ........................................................................................................... 14-1

Software version ..................................................................................................................... 14-1

Probe station configuration ................................................................................................ 14-2

Set up communications ........................................................................................................... 14-2

Load, align, and contact the wafer .......................................................................................... 14-4

Set up wafer geometry ............................................................................................................ 14-4

Create a site definition and define a probe list ........................................................................ 14-4

Clarius probesites and probesubsites project example ..................................................... 14-4

MPI Sentio setup ..................................................................................................................... 14-4

Use KCon to add a prober....................................................................................................... 14-4

Clarius ..................................................................................................................................... 14-6

Commands and error symbols ........................................................................................... 14-8

Tektronix Keithley 4200A-SCS User Manual

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