Tektronix Keithley 4200A-SCS User Manual

Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control
6-42 4200A-913-01 Rev. A December 2020
If CabCompFile does not exist, or if there is no path specified (null string), the default compensation
parameters are used. When entering the path, be sure to use two \ characters to separate each
directory. For example, if your cable file is in:
C:\calfiles\590cal.dat
You would enter:
C:\\calfiles\\590cal.dat
If you are controlling a switch matrix to route signals using a connection UTM (for example,
“connect”), you do not need connect InputPin and OutputPin. Set these parameters to 0.
Also see
None
SIMCVsweep82 user module
The SIMCVsweep82 routine performs a simultaneous capacitance versus voltage (C-V) sweep using
the Keithley Instruments 82 C-V System.
Usage
status = SIMCVsweep82(double Frequency, double Default_Bias, double Stress_Time, double
VSub_Start, double VSub_Stop, double VSub_Step, int Range595, int Range590, int
Model590, int Filter, double Delay595, int LeakageCorrection, char *CabCompFile, int
OffsetCorrect, char *InstldStr, int InputPin, int OutPin, double *CHF, int
CHF_ArrSize, double *VSub, int VSub_ArrSize, double *CQS, int CQS_ArrSize, double
G_or_R, int G_or_R_ArrSize, double *QT, int QT_ArrSize);
status
Returned values are placed in the Analyze sheet; see Details
Frequency
The measurement frequency to use for the 590:
▪ 100 kHz: 0
▪ 1 MHz: 1
Default_Bias
DC bias applied before and after a voltage sweep (−100 V to +100 V)
Stress_Time
Time for which default bias is stressed on the device before voltage sweep: 0 s
to 999 s
VSub_Start
Start voltage on substrate: −120 V to +120 V
VSub_Stop
Stop voltage on substrate: −120 V to +120 V
VSub_Step
Voltage step size: ±0 V , ±0.01 V, ±0.02 V, ±0.05 V, or ±0.1 V
Range595
The measurement range for the 595 to use:
▪ 200 pF: 1
▪ 2 nF: 2
▪ 20 nF: 3
Range590
The measurement range for the 590 to use: 1 to 4; refer to Details
Model590
The measurement model to use for high frequency measurement:
▪ Parallel mode: 0
▪ Series model: 1

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English

Summary

Safety Precautions

General Safety Precautions

Essential safety guidelines for operating the instrument and associated equipment.

Electrical Shock Hazards

Details on identifying and avoiding hazardous voltage conditions and electric shock risks.

Using Switch Matrices

Matrix Card Types

KCon Setup for Switch Matrix

Configure and Use a Series 700 Switching System

Update Switch Configuration in KCon

Guide to managing instrumentation configuration using KCon after physical connections.

Set Up Measurements in Clarius

Steps to configure and run tests using the Clarius application with the switching system.

Using a Model 590 C-V Analyzer

Model 590 Test Examples

Using a Keysight 4284/4980A LCR Meter

C-V Measurement Basics

Capacitance Measurement Tests

Using KCon to Add Keysight LCR Meter

Instructions for adding the Keysight LCR Meter to the 4200A-SCS system configuration.

Using a Model 82 C-V System

Capacitance Measurement Tests

User modules for capacitance testing using the Model 82, including C-t, Simultaneous C-V, and QTsweep.

Simultaneous C-V Measurements

How the 590 and 595 measure capacitance during the same voltage sweep for C-V analysis.

Cable Compensation

Procedure to correct unwanted capacitances by connecting known sources.

Model 82 Projects

Using a Keysight 8110A/8111A Pulse Generator

Pulse Generator Tests

Using KCon to Add Keysight Pulse Generator

Steps to add the pulse generator to the 4200A-SCS system configuration using KCon.

Set Up a Probe Station

Prober Control Overview

How the 4200A-SCS controls probe stations using GPIB or RS-232 interfaces.

PRBGEN User Library

Prober-control software provided by vendors, accessed via the PRBGEN user modules.

Example Test Execution Sequence: Probesites Project

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 Prober Software

Load, Align, and Contact the Wafer

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 Prober Software

Set Up Wafer Geometry

Create a Site Definition and Define a Probe List

Using a Cascade Summit-12000 Prober

Cascade Summit-12000 Prober Software

Set Up Probers using the Velox Prober Control Software

Set Up Probers using the Nucleus UI Prober Control Software

Using a Signatone CM500 Prober

Signatone CM500 Prober Software

Using an MPI Probe Station

MPI Prober Software

Probe Station Configuration

Steps to set up and configure the MPI prober for use with the 4200A-SCS.

Set Up Communications

Use KCon to Add a Prober