Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober
4200A-913-01 Rev. A December 2020 10-23
Probesubsites Clarius project example
The following is a step-by-step procedure to configure the 8860 so the probesubsites Clarius
project executes successfully.
When using pcIndie, ensure that the project and the program listing on the Micromanipulator match
(the program listing is a list of absolute chuck moves in the order of execution). When creating the
program listing, use a repeatable pattern.
In this example, five dies have been selected for probing. On each die, two subsites have been
selected.
Use the pcBridge to configure the 8860:
1. Move to the first subsite of the first die.
2. Add it to the program listing.
3. Move to the second subsite on the first die.
4. Add it to the program listing.
5. Move to the first subsite on the second die.
6. Add it to the program.
7. Continue moving and adding until all subsites have been entered into the list.
Using this type of pattern allows the project structure to issue two PrSSMovNxt commands in the
loop for each die to be probed. Refer to the following figure for an illustration of a repeatable pattern.
Figure 217: Multiple subsites per die
Ensure that all steps of Setup have been completed before starting pcIndie.

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English

Summary

Safety Precautions

General Safety Precautions

Essential safety guidelines for operating the instrument and associated equipment.

Electrical Shock Hazards

Details on identifying and avoiding hazardous voltage conditions and electric shock risks.

Using Switch Matrices

Matrix Card Types

KCon Setup for Switch Matrix

Configure and Use a Series 700 Switching System

Update Switch Configuration in KCon

Guide to managing instrumentation configuration using KCon after physical connections.

Set Up Measurements in Clarius

Steps to configure and run tests using the Clarius application with the switching system.

Using a Model 590 C-V Analyzer

Model 590 Test Examples

Using a Keysight 4284/4980A LCR Meter

C-V Measurement Basics

Capacitance Measurement Tests

Using KCon to Add Keysight LCR Meter

Instructions for adding the Keysight LCR Meter to the 4200A-SCS system configuration.

Using a Model 82 C-V System

Capacitance Measurement Tests

User modules for capacitance testing using the Model 82, including C-t, Simultaneous C-V, and QTsweep.

Simultaneous C-V Measurements

How the 590 and 595 measure capacitance during the same voltage sweep for C-V analysis.

Cable Compensation

Procedure to correct unwanted capacitances by connecting known sources.

Model 82 Projects

Using a Keysight 8110A/8111A Pulse Generator

Pulse Generator Tests

Using KCon to Add Keysight Pulse Generator

Steps to add the pulse generator to the 4200A-SCS system configuration using KCon.

Set Up a Probe Station

Prober Control Overview

How the 4200A-SCS controls probe stations using GPIB or RS-232 interfaces.

PRBGEN User Library

Prober-control software provided by vendors, accessed via the PRBGEN user modules.

Example Test Execution Sequence: Probesites Project

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 Prober Software

Load, Align, and Contact the Wafer

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 Prober Software

Set Up Wafer Geometry

Create a Site Definition and Define a Probe List

Using a Cascade Summit-12000 Prober

Cascade Summit-12000 Prober Software

Set Up Probers using the Velox Prober Control Software

Set Up Probers using the Nucleus UI Prober Control Software

Using a Signatone CM500 Prober

Signatone CM500 Prober Software

Using an MPI Probe Station

MPI Prober Software

Probe Station Configuration

Steps to set up and configure the MPI prober for use with the 4200A-SCS.

Set Up Communications

Use KCon to Add a Prober