10. Either using the Z Up/Z Down buttons on the Motion Control window, or the joystick if set for
Scan Z Axis (see CAUTION), make contact with the wafer.
11. When probe tips are making good contact with the wafer, right-click the Contact button.
12. Click the Set to Current Position button.
Figure 274: Set to Current Position button
When the Joystick mode is set to "Scan Z Axis," the joystick will control Z movement. While
in this mode, the prober beeps providing an audible alert. When this alert is heard, care
should be exercised when using the joystick for Z travel adjustments. Avoid damage to the
probe needle or the wafer while changing the Z height.
The Up/Down arrows may be used to set Z contact. When using the arrows, travel is fast (coarse
adjustment) when away from the Z contact position, and slow (fine adjustment) when close to the Z
contact position.
When setting the Z contact, the camera stays focused on the probe needles (not on the wafer).
Probesites Clarius Project example
The following is a step-by-step procedure to configure the Summit 120000 so the probesites
Clarius project executes successfully.
Nucleus UI or Velox software
Using either the Velox software or the Nucleus UI software on the probe station computer, edit and
open a wafer map file as described in Set up wafer geometry (on page 12-8) and Create a site
definition and define a probe list (on page 12-12).
Use KCon to add a prober
On the 4200A-SCS, use KCon to add the prober to the configuration:
1. Open KCon.
2. At the bottom of the System Configuration list, select Add External Instrument. The Add
External Instrument dialog box is displayed.
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