Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System
4200A-913-01 Rev. A December 2020 6-5
As shown in the following figure, the first high frequency measurement (CH1) is made during the
second phase of the voltage sweep. Only quasistatic capacitance (C1) is measured during the first
phase and is disregarded.
Figure 81: Simultaneous C-V waveform
In the figure:
• CQ represents 595 quasistatic capacitance readings
• VQ represents voltage reported by the 595 corresponding to CQ
• CH represents Model 590 high frequency capacitance readings
• VH represents the voltage reported by the 590 corresponding to CH
Cable compensation
Ideally, the Model 82 would only measure the capacitance of the DUT. However, signal pathways
through the test cables, switch matrix, test fixture, and prober contribute unwanted capacitances that
may adversely affect the measurement.
To correct for these unwanted capacitances, cable compensation should be done before measuring
the capacitance of the DUT. In general, compensate for cables by connecting precisely known
capacitance sources in place of the DUT and then measuring them. The Model 590 then uses these
measured values to correct for unwanted capacitance when measuring the DUT.

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English