Load, align, and contact the wafer
Refer to the MPI Sentio User Manual for information on how to load, unload, set chuck heights, align,
contact, and set the home position of the wafer.
Set up wafer geometry
Refer to the MPI Sentio User Manual for information on how to set up the wafer map.
Create a site definition and define a probe list
Refer to the MPI Sentio User Manual for information on how to add and edit subsites and sites. To
create a site definition for a single subsite for each die, you need to use the MPI software to create a
selection of dies to probe.
To create a site definition for multiple subsites for each die, you need to use the MPI software to
create a selection of dies to probe and create a selection of subsites on each die to be probed.
Clarius probesites and probesubsites project example
The following is a step-by-step procedure to configure an MPI prober so the probesites or
probesubsites Clarius projects execute successfully.
MPI Sentio setup
Using MPI Sentio on the prober, edit and open a wafer map file. Refer to the MPI Sentio
documentation to:
• Load, align, and contact the wafer
• Set up wafer geometry
• Create a site definition
• Define a probe list
The wafer map file allows Clarius to send commands to instruct MPI Sentio to move the prober to the
next site or the next subsite.
Use KCon to add a prober
On the 4200A-SCS, use KCon to add the prober to the configuration:
1. Open KCon.
2. At the bottom of the System Configuration list, select Add External Instrument. The Add
External Instrument dialog box is displayed.
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