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Cascade Microtech PA200 prober software ............................. 9-1

Probe station configuration....................................................... 9-3

Set up communications ............................................................ 9-3

Set up wafer geometry ........................................................... 9-11

Create a site definition and define a probe list ....................... 9-14

Load, align, and contact the wafer ......................................... 9-16

Clarius probesubsites project example .................................. 9-22

Commands and error symbols ............................................... 9-30

Cascade Microtech PA200 prober software

To configure and operate the PA200 prober with the Keithley Instruments 4200A-SCS, you need the

following applications:

• ProberBench NT: Provides easy access to configuration and help programs.

• Wafer Map: Use to configure wafer geometry, set origin, set home, select dies to probe, and align

the wafer.

• Chuck Navigator: Use to move the chuck and select subsites.

• PB-GPIB: Use to configure the GPIB interface.

• PB-RS-232: Use to configure the serial interface.

• Prober Setup (in the service programs folder): Use to initialize the serial communications port.

Software versions

The following list contains the software versions used to verify the configuration of the PA200 prober

with the 4200A-SCS.

Product Name:

WaferMap for ProberBench NT

Product Version:

3.1 (Feb 12, 1999)

Kernel:

3.000000 ProberBench Kernel Version 3.10 12-7-98

Control Box:

2.400000 ProberBench Control Box 2.4

Section 9

Using a Cascade Microtech PA200 Prober

Tektronix Keithley 4200A-SCS User Manual

Other manuals for Tektronix Keithley 4200A-SCS