Tektronix Keithley 4200A-SCS User Manual

Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control
9-20 4200A-913-01 Rev. A December 2020
If the alignment is not correct, repeat the alignment. If the alignment is correct, click Finish.
Figure 156: Aligning the wafer: Point 2
Set the chuck heights
To set the chuck heights:
1. Launch the navigator from the ProberBench NT window icon.
2. In the Chuck Navigator dialog box, use the chuck up and down arrows to make contact with the
wafer on the home die and home subsite.
Figure 157: Chuck navigator dialog box wafer height

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English