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Tektronix Keithley 4200A-SCS User Manual

Tektronix Keithley 4200A-SCS
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Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System
4200A-913-01 Rev. A December 2020 6-13
Figure 89: Cable compensation dialog boxes
Clicking Cancel in a cable compensation dialog box aborts the cable compensation process. To start
over, click Run.
Capacitance tests
The following topics describe the user modules that can be made into tests Clarius.
QTsweep (equilibrium test)
To achieve accurate simultaneous C-V test results, measurements must be made with the device in
equilibrium. A device is considered to be in equilibrium when all internal capacitances are fully
charged before measuring the capacitance. For a fully charged capacitor, any measured current is
leakage.
After voltage step is applied to the device, a delay time is used to allow capacitances to fully charge
before measuring quasistatic capacitance. If the delay time is too short (capacitors still charging), the
quasistatic capacitance measurement will not be accurate. This test allows you to determine the delay
time required to achieve equilibrium.
This example assumes that the Model 82 is connected directly to the DUT. The DUT could be a
device installed in a test fixture, or a substrate on a wafer.
To open and execute the QTsweep UTM:
1. Choose Select.
2. In the Test Library, select Custom Test, Choose a test from the pre-programmed library
(UTM).
3. Drag the test to the project tree.
4. Select Configure.
5. In the Test Settings pane, under User Libraries, select ki82ulib.
6. Under User Modules, select QTsweep82.

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Tektronix Keithley 4200A-SCS Specifications

General IconGeneral
BrandTektronix
ModelKeithley 4200A-SCS
CategoryMeasuring Instruments
LanguageEnglish

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