Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 5: Using a Keysight 4284/4980A LCR Meter
4200A-913-01 Rev. A December 2020 5-3
Signal connections
Basic 4-wire signal connections for the Model 4284A or 4980A are shown in the following figure. The
center conductors of the BNC connectors are connected to the device under test (DUT). The outer
shield of one of the coaxial cables is typically connected to a Faraday shield. The Model 4284A or
4980A output is typically connected to the wafer backside (or well). The input is typically connected to
the gate of a MOS capacitor.
Figure 71: Basic Model 4284A and 4980A connections to DUT
Triaxial connections
Adapters are required to connect the Model 4284A or 4980A to equipment (for example, a probe
station, test fixture, or matrix card) that uses triaxial connectors.
See Using Switch Matrices (on page 2-1) for details on using a switch matrix with the Model 4284A
or 4980A LCR Meter.

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English