Tektronix Keithley 4200A-SCS User Manual

Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control
6-16 4200A-913-01 Rev. A December 2020
Simultaneous C-V sweep
The Model 82 uses the Models 595 and 590 to perform simultaneous C-V measurements. Refer to
Simultaneous C-V measurements (on page 6-4) for detail on simultaneous C-V measurements.
This example assumes that the Model 82 is connected directly to the DUT. The DUT could be a
device installed in a test fixture, or a substrate on a wafer.
To do a simultaneous C-V sweep:
1. In the project tree, select cvsweep.
2. Select Configure.
3. Modify the test parameters as needed. Refer to SIMCVsweep82 user module (on page 6-42) for
definitions.
4. Select Run.
If you use the parameters shown in the figure below, the Model 82 performs a −3 C to +3 V staircase
sweep using 20 mV steps, delaying 70 ms on each step.
Figure 93: SIMCVsweep82 user module

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English