Setup & Operation 2. Specifications
20 S5 Rev.5
2.3 Appearance
Part Names and Motion Range of Each Arm
Arm Motion
Arm #1 : The whole Manipulator revolves.
Arm #2 : The lower arm swings.
Arm #3 : The upper arm swings.
Arm #4 : The wrist revolves.
Arm #5 : The wrist swings.
Arm #6 : The wrist rotates.
LED Lamp
(This lamp lights up
while the motors are ON.)
Upper Arm (Arms #3 to #6)
Details of Connector Plate (View A)
Standard model
Protection-model
A : Grease Supply Opening
B : User Cable Connector
(15 pin D-sub connector)
C : Air Supply Opening
D : Air Supply Opening
E : Signal Connector
F : Power Connector
G : Exhaust Port
(Only Cleanroom-mode)