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5528A
HP 5528A User Manual
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Model
5528A
Flatness
Measurements
'~
-------------T
.
------------~
C
H~
------------
~
~------------1
0
~II
Fi8urc
9-5
.
Location
of
Laser
I-
l
ead
2
.
5
e
m
(1
.0
In
.)
5.
P
l
ace
the
F
l
atness
Mirror
wilhout
the
Angular
I
n
terferometer
in
co
rner
"C"
in
the
la
s
er
beam's
path
,
so
its
base
is
para
ll
el
to
edge
"GE"
and
flush
with
th
e
corner
of
the
Surface
Pl
ate
.
(
See
Figure
9-6
.)
SECOND
FLATNESS
MIRROR
ANGULAR
INTERFEROMETER
~a=-=II
=)
FOOTSPACER
+
ANGULAR
REFL
EC
TOR
~'RST
FLATNESS
MIRR
OR
STRA
I
GHTEDGE
Figure
9-6
.
Po
s
itioning
of
Optics
for
First
Mc.l
su
rcmcnt
Line
9-
7
149
151
Table of Contents
Laser Measurement System
5
Electrical Safety Considerations
6
General
6
Before Applying Power
6
Safety Earth Ground
6
Laser Head Safety Labels
7
Table of Contents
9
List of Figures
17
Tables
20
Contents
23
Introduction to Hp's 5528A Laser Measurement System
23
How to Use this Manual
23
How Safe Is the Laser?
24
What Safety Precautions Should I Take?
24
Where Should I Keep the Ss28A When I'M Not Using It?
24
What Measurements Can the Ss28A Makb
25
What Equipment Is Required to Make These Measurements?
25
Hardware - General Descriptions
28
5508A Measurement Display
28
5518A Laser Head
28
Optics
28
Straightness Optics
29
Mounting Hardware
29
Section 2: First Look
31
Purpose
32
Measurement Display Unit
33
Front Panel - Tndicators, Line Switch
34
Front Panel - Measurement Mode Keys
34
Reset Key
34
Distance
34
Front Panel - Set up Keys
35
Matl Temp Keys
35
V.o.l.
35
Exp Coeff
35
Front Panel - Entry Keys
36
Rear Panel
36
10751 Air Sensor and 10757 Material Temperature Sensor
41
Why Measure Air Temperature, Pressure or Humidity?
41
Why Measure Material Temperature?
41
Operation
42
Physical Setup
42
Interconnection and Turn-On
44
Assembly of Optics
45
Assembly of Interferometer
45
Installation and Alignment of Optics
46
Mounting
46
Table Mounting
46
Positioning of Optics
47
Side View
47
Distance Interferometer with Target
48
Making the Measurement
50
Making an Angular Measurement
55
Measurement Procedures
58
Summary
58
Operating Procedures
58
Reference Material
59
Miscellaneous Notes
59
Physical Set-Up of the Laser Head and Tripod
60
Installing the Laser Head on the Tripod
60
Contents
60
Introduction
60
Hardware Required for All Measurements
61
Laser Head and Tripod Positioning Controls
63
Cross Slide "Fit" Adjustments
65
Translating and Rotating the Laser Head
65
Positioning the Tripod and Laser Head
66
Levelling the Laser Head
68
Section Interconnections, Turn on
70
Safety Information
70
Contents
70
Connecting the Laser Head to the Measurement Display
71
Connecting Sensors to the Measurement Display
73
Connecting the Rem Ote Control Box to the Measurement Display
75
TO the MEASUREMENT Display
77
CHECKING the LINE-Voltage SELECTION
79
Connecting Hie System to the P Ower Line
79
Line Voltage Selection
80
Turn-On
81
Distance Measurements
82
Operating Specifications
82
Contents
82
Introduction
82
Power-Up
83
Hardware Required
85
Optional Hardware
85
Related Measurements
85
Reference Material
85
Interferometer Assembly
88
Assembly of Optics
88
INSTALLATION and ALIGNMENT of Optics
90
Description
90
Procedure
91
Installation if Table Moves
92
Installation if Spindle Moves
92
Table Mounted
94
Spindle Mounting
94
Checking Alignment for Beam Strength
96
Checking Alignment for Cosine Error
97
Measurements Along a Perpendicular Axis
98
Three Axes Positioning of Optics
99
Other Mounting Requirements
100
Selecting "Measurement Units
100
Measurement Display Settings, Sensor Use
100
Using Sensors
101
Sensor Attachment
101
Sensor Placement
101
Air Sensor Orientation
102
Measurement Display Settings
103
Adjusting Humidity
103
Set up Keys
103
Making a Measurement
106
System Checks
106
What Affects Accuracy?
106
Procedure
106
Distance Measurement Error Sources
107
Velocity -Of-Light Compensation
107
Minimizing Effects
107
Material Temperature Measurement
108
Measurement Axis (Cosine Error)
109
Uncompensated Measurement Path Length
110
Using the Error Budget Worksheet
110
Error Budget Worksheet
113
Velocity Measurements
116
Section 7, Velocity Measurements
117
Reference Material
117
Assembly, Installation, and Alignment, of Optics
117
Measurement Display Setiings, Sensor Use
117
Selecting "Measurement Units
117
Using Sensors
118
Measurement Display Settings (Wi T H Sensors)
119
Angular Measurements
124
Introduction
124
Operating Specifications
124
Related Measurements
126
Installation and Alignment of Optics
126
Important Considerations
126
Description
126
Checking Alignment for Beam Strength
136
M Easu�Ement5 Along a Perpendicu Lar Axis
136
Other Mounting Requirements
136
Measurement Units
139
Measurement Mode Keys
139
Measurement Display Setiings
140
Making a Measurement
140
System Checks
140
Procedures
140
Measurements at Specific Physical Locations
141
Measurements at Specified Time Intervals
141
Laser System Error Sources
141
Minimizing Errors, and Required Laser System Accuracy
142
Flatness Measurements
144
Accuracy Term
144
Grid Map of Surface Plate
149
Location of Laser Head
150
Positioning of Optics for First Measurement Line
150
What Affects Accuracy
155
Straightness Measurements
156
Slope
169
Environmental Errors
179
Contents
182
Hardware Required
184
Related Measurements
186
Reference Material
186
Installation and Alignment of Optics
186
Important Considerations
186
Description
187
Installing Optics for a Vertical-Axis Measurement
187
Final Adjustments (after Aligning)
197
Checking Alignment for Beam Strength
198
Travel Path
223
Manual Removal or Slope
223
Measurement Display Settings
223
Making a Measurement
223
System Checks
223
Squareness Measurements
228
Parallelism Measurements
250
Linear Parallelism Measurements
250
First-Axis Measurement
251
Rotational Parallelism Measurements
255
Alignment Techniques
258
Summary of Alignment Methods
258
Translating and Turning the Laser Head
259
Gunsight Method
259
Result of Retroreflector Movement
262
Vertical Axis
262
Horizontal Axis
262
When to Turn the Laser
264
Autoreflection Method
265
Maximum Measurement Reading Method
268
Autoreflection Summary
268
More about the Reset Key
276
Selecting the Auto Record Output Rate
276
More about the Set up Keys
277
More about the Preset Key
278
Entering a Preset Number
278
Viewing a Preset Number
278
More about the MATL Temp Key
279
To Display the Material Temperature
279
To Enter a Material Temperature
280
More about the V.O.L. Key
280
To View the Current V.O.L. Compensation Number
281
To Enter a V.O.L. Compensation Number
281
More about the RESOL Key
282
Smoothing
282
To Display the Resolution Value
282
To Specify a Resolution Value
282
More about the EXP COEFF Key
283
To View the Expansion Coefficient Value
283
To Enter an Expansion Coefficient Value
283
Errors and Error Messages
284
Laser Measurement System Error Messaages
284
HP-IB Information
288
Data Transfer Without an HP-IB Controller
289
Compensation Factor for Standard Conditions
299
Sensor Considerations
300
Absolute Pressure Versus Adjusted Pressure
300
Use of Compensation Charts
301
Guide to Compensation Tables
301
Calculation of Exact Compensation Factor
302
How Do You Enter the V.O.L. Compensation Value?
304
Operator Maintenance
306
Cleaning the Measurement Display Unit's Air Filter
306
Calibration
306
Cleaning the Optics
307
Straightness and Squareness Considerations
308
Calculation of Slope
308
End Point Fit Method
308
Least Squares Fit Method
310
Calculation of Squarenes
313
Squareness Sign Conventions
315
Determining Sign Conventions
315
Into and out of a Square
316
Squareness Sign Convention Guide
317
Principles of Operation
324
Hardware Descriptions
324
Laser Head
325
Air Sensor
325
Material Sensor
326
Linear Interferometer
326
Linear Retroreflector
326
Angular Interferometer
326
Principles of Measurements
327
General System Principles
327
Distance and Velocity Measurements
329
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HP 5528A Specifications
General
Brand
HP
Model
5528A
Category
Measuring Instruments
Language
English
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