Model
5528A
Straightness and Squareness Considerations
For
AKis
2 -
Our
raw data
is
-
YLMS
= -0.5. - 1
.2,
-
2.5
, -3.8, -4.0. -4.8, -5.9, -6.2, -7.4. -8.8 (micron
s)
x
=-
0.0, 0.05, 0.1.
0.15,0
.2
.0
.2
5,0
.
3.0
.35,0.4,
0.45
(metre)
Number
of points =
10
Calculations
for
Axis
2 -
AKis
2 Oala -
X V
X'
XV
0.0 0.5 0
0.0
0.05
-1.2 0.00025
-0
.
060
0.1
-2.5
0.010 -0.
250
0.15
-3.8
0.0225 -0.570
0.2
-4.0
0.040
-O.BOO
0.25
-4.B 0.0625 -1.
20
0.3
-5.9
0.090 - 1
.77
0.35
-6.2
0.1225
-
2.17
0.4
-7.4
0.160 - 2.96
0.45 -
B.B
0.2025
-3.96
2.
25
-
45
.1 0.7125
-13.74
111
2 =
(-45.1
)1
2.25) - (10)(-13.74)
--'--'--'--'---'---
-'--
= - 17.42 microns/metre
(2.25
)'
- (10
)1
0.7125)
(2.
25
)1-13.74) - (-45.1
)(
0.7125)
b = = 0.591 micron
12.25
)'
- (10
11
0
.7
125)
Y sl
ope:
- m2 X +
~
- - 17.42X
--0
.5
91 micron
X -
YLMS
=
YsIO
P1'
-
0.0
0.5
-0
.
291
0.05
-1
.2
-1.46
0.1
0.
15
0.2
-2.5
-3.8
-4.0
-2.33 -3.2 -4.08
0.25
-4.8
-4
,95
0.3 0.35
-5
.9
-6
.2
-5.82
-6.69
0.4
0.45
-7
.4
-
8.8
-2.56 -8.43
Ylrus -
0.09 -0.262 -0.167
-0
.596
0.08
-0.146 -0.083 0.488 0.
159
-0.37 (microns)
21·6
CALCULATION
OF
SQUARENESS
Squareness is determined
by
comparing
th
e angl
es
of misalignment for two Straightness
measurements. This
is
what
must
be
done
-
1. For each
axis
,
determine
the angle of misalignment (9).
This
is
done
by takins
th
e arctangent of the slope (m) of each Straightness measurement and
multiplying by 3600,
to
convert
it
to
"arcseconds".
OCT
87
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