Rev. 2.0
Maintenance Guide
5-29
5-14-3. Placing the Support Table Surface Horizontally
To check flatness of the support table, attach a lever dial to the head's OCC camera bracket and
measure flatness near the center of each area circled in the figure below. Adjust the height of the
table so that the difference in flatness at the three positions is within 0.02 mm.
Fixing screw
Adjustment
screw
Figure 5-14-3-1 Measurement Locations and Adjustment Screw
<Adjustment Procedure>
1) Secure the support table at the part c temporarily. Tighten the screws so that the ball screw
does not rotate as the table is raised. At this time, assemble the support table so that the
dimension L is as follows.
Front reference: 27.0 mm ± 0.5 mm
Rear reference: 21.9 mm ± 0.5 mm
2) Select [Manual Control] → [Transport Control] to set the support table to a position of −27mm.
3) Based on the lowest point of three measured points, turn the adjustment screw in the down
direction (screw tightening direction) to make the adjustment so that the difference among
three measured points is 0.02mm or less.
∗ If all of three screws (screws around the adjustment screws) fixing the ball screw are loosened,
the table may be lowered. To prevent such trouble, always tighten the screws temporarily
after the adjustment with the adjustment screws has been completed.
∗ After the adjustment has been completed, make sure that the center of the rail guide shaft is
aligned with that of the side beam.
(A-dimension is 1mm±0.5.)
Figure 5-14-3-2 Rail Guide Shaft and Side Beam
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