Rev. 2.0
Maintenance Guide
14-31
14-5. X-Y Unit
The X-Y unit is composed of AC servo amplifier that drives the X/Y-axes and a magnescale that
detects the movement position.
14-5-1. Structure of X-Y Unit
Three single-axis servo amplifiers are mounted on the AC servo amplifier (two AC servo
amplifiers to drive the Y-axis and one servo amplifier to drive the X-axis). Additionally, one X-axis
magnescale detector head and two Y-axis magnescale detector heads are mounted on the
X-axis frame.
(See Figure 14-1-1-3. → 12 ) (See Figure 14-1-1-2. → 13 )
Figure 14-5-1-1 Configuration of XY-Unit<M and L board specifications>
∗ XL board specifications X, YR, YL: See Figure 14-1-2-2. → 13
<AC servo amplifier part No.>
Axis Part No. Part name
YL-axis and YR-axis 40044539 SERVO AMP 2000W
X-axis 40044538 SERVO AMP 750W
∗ Motor output
YL-axis and YR-axis; 1500W
XL-axis and XR-axis; 750W
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