Rev. 1.0
Maintenance Guide
3-4
3-2-2. Adjusting the Sensor Height
Move the bad mark sensor to a point above the calibration block. Loosen the SEMS cap bolts at
two places and move the BMR lens bracket so that the distance between the surface of the bad
mark sensor and the top surface of the calibration block becomes 28
+0.5
0
mm.
After the sensor height has been adjusted, secure the bad mark sensor with SEMS cap bolts.
After the bad mark sensor has been mounted properly, input the bad mark sensor offset of the
MS parameters.
(For details about how to input MS parameters, see “MS Parameters”.)
SEMS cap
HMS
BM
CAL block
top surface
Figure 3-2-2-1 Adjusting the Lens Height
CAUTION
To prevent any personal injury, do not put your hand inside the
machine or your face or head close to the machine during operation
of the touch panel and/or HOD.
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