Rev. 2.0
Maintenance Guide
5-26
5-14. Replacing the Support Table Motor (BU Motor)
1) Remove the support table as described below.
1. Stretch the transport width as much as possible.
2. Remove the support table setscrews d (15 pcs.) to
detach the support table c.
∗ When handling the ball screw, do not pull out the
shaft. Doing so may cause internal balls to fall down
and the shaft to be no longer used.
2) Loosen the encoder assembly setscrew e and move the encoder assembly in the direction
indicated by an arrow mark to loosen the tension of the timing belt for driving of the support
table ball screw.
Figure 5-14-2
3) Loosen the setscrew f to take out the support table
assembly together with the torque support assembly.
4) Remove the motor fixing screw g to detach the motor
from the bracket.
5) Loosen the setscrew h to detach the torque supporter
assembly from the motor shaft.
6) When installing a new BU motor, reassemble the
components in the order of steps 4) to 1).
Perform the following when reassembling.
Adjust the gap between the torque supporter and
support table motor.
Adjust the tension of the support table driving
timing belt.
Place the support table surface horizontally.
Obtain the support table offset.
Figure 5-14-3
② ② ②
② ②
①
Figure 5-14-1
②
③
④
⑤
⑥
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