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Keithley
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6430
Keithley 6430 User Manual
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Calibration
19-9
T
able 19-3
Mainframe volta
ge calibration summary
Source range
1
Source voltage
Multimeter voltage reading
2
00
0.2V
+200.00mV
+000.00mV
-200.00mV
+000.00mV
___________ mV
___________ mV
___________ mV
___________ mV
00
2V
+2.0000V
+0.0000V
-2.0000V
+0.0000V
___________
V
___________
V
___________
V
___________
V
0
20V
+20.000V
+00.000V
-20.000V
+00.000V
___________
V
___________
V
___________
V
___________
V
200V
+200.00V
+000.00V
-200.00V
+000.00V
___________
V
___________
V
___________
V
___________
V
1
Use EDIT and RANGE keys to select source range.
2
Multimeter reading used in corresponding calibration step. See procedure.
458
460
Table of Contents
Table of Contents
7
Safety Precautions
5
List of Tables
27
6 Range, Digits, Speed, and Filters
28
Getting Started
33
General Information
34
Contact Information
34
Manual Addenda
34
Safety Symbols and Terms
34
Warranty Information
34
Inspection
35
Options and Accessories
35
Calibration Standards
37
Product Overview
38
Mainframe and Remote Preamp Familiarization
39
Figure 1-1 Front Panel
39
Mainframe Front Panel Summary
39
Figure 1-2 Model 6430 Rear Panel
41
Mainframe Rear Panel Summary
41
Remote Preamp Summary
42
Power-Up
44
Line Power Connection
44
Line Frequency Setting
45
Power-Up Sequence
45
System Identification
45
Fuse Replacement
46
Display
47
Display Format
47
EDIT Key
47
TOGGLE Key
47
Disabling Front Panel Display
48
Front Panel Tests
48
Remote Display Programming
48
Status and Error Messages
48
Default Settings
49
Saving and Restoring User Setups
49
Factory Default Settings
50
Power-On Configuration
50
Remote Setups
52
Menus
53
Main Menu
53
Getting Started
55
Figure 1-5 Main Menu Tree
55
Rules to Navigate Menus
56
Editing Source and Compliance Values
57
Toggling the Source and Measure Display Fields
57
Configuration Menus
58
Figure
60
Figure
61
Figure
62
Figure
63
Connections
65
Connection Overview
66
Source-Measure Terminals
67
Figure 2-1 Basic Input/Output Configurations
68
Test Fixture Interlock
69
Connections to DUT
70
Figure
71
Guarding Methods
73
Figure 2-5 Guarded Ohms Connections (Basic)
74
Ohms Guard
74
Figure 2-6 Guarded Ohms Connections (Guard Sense)
75
Figure 2-7 Guarded Ohms Connections (6-Wire Ohms)
76
Guard Selection
77
Basic Source-Measure Operation
80
Caution
80
Operation Overview
81
Compliance Limit
82
Setting the Compliance Limit
83
Auto Zero
84
NPLC Caching
85
V-Source Protection
86
Source Delay
87
Basic Source-Measure Procedure
88
Current Measurements and Capacitive Loads
89
Front Panel Source-Measure Procedure
90
Remote Command Source-Measure Procedure
93
Remote Command Measure Only
96
Sink Operation
97
Ohms Measurements
99
Figure 4-1 Ohms Configuration
100
Ohms Measurement Methods
101
Selecting Ohms Measurement Method
102
Manual Ohms Measurements
103
Ohms Sensing
104
Offset-Compensated Ohms
105
Enabling/Disabling Offset-Compensated Ohms
106
Ohms Source Readback
107
Remote Ohms Programming
108
Source-Measure Concepts
109
Compliance Limit
110
Maximum Compliance Values
111
Compliance Principles
112
Overheating Protection
113
Figure 5-2 Simplified Trigger Model
115
Figure 5-3 Three Basic Sweep Waveform Types
116
Sweep Waveforms
116
Operating Boundaries
117
Figure 5-4 Operating Boundaries
118
I -Source Operating Boundaries
118
Figure 5-6 I-Source Operating Boundaries
121
V-Source Operating Boundaries
122
Figure 5-7 V-Source Boundaries
123
Source I Measure I and Source V Measure V
126
Figure 5-10 Source V
128
Figure 5-11 Measure-Only (V or I)
129
Guard
130
Figure 5-12 High-Impedance Measurements
131
Figure 5-13 In-Circuit Ohms Measurements
132
Ohms Guard
132
Data Flow
134
Figure 5-15 Data Flow Front Panel
135
Buffer Considerations
136
6 Range, Digits, Speed, and Filters
140
Range, Digits, Speed, and Filters
139
Range and Digits
140
Table 6-1 Model 6430 Ranges
140
Manual Ranging
141
Maximum Readings
141
Auto Ranging
142
Digits
143
Remote Range and Digits Programming
144
Speed
145
Figure 6-1 Speed Configuration Menu Tree
146
Table 6-4 Speed Commands
146
Figure 6-2 3-Stage Filtering
147
Figure 6-3 Repeat Filter (Count 10)
148
Figure 6-4 Median Filter (Rank 5)
149
Table 6-5 Auto Filter Settings Where NPLC = 0.01 to
151
Table 6-6 Auto Filter Settings Where NPLC = 0.11 to
152
Table 6-7 Auto Filter Settings Where NPLC = 1.01 to
152
Filter Configuration
153
Filter Control
154
Table 6-8 Filter Commands
154
Table 6-9 Filter Programming Example
155
Relative and Math
157
7 Relative and Math
159
8 Data Store
174
Relative
158
Remote Rel Programming
159
Table 7-1 Rel Commands
159
Math Operations
160
Percent Deviation
162
Front Panel Math Operations
163
Remote Math Operations
164
Table 7-3 Math Commands
164
Figure 1-3 Remote Preamp
165
Table 7-4 Voltage Coefficient Programming Example
165
User-Defined Math Functions
166
Data Store Overview
170
Buffer Statistics
171
Timestamp Format
172
Buffer Considerations
173
Remote Command Data Store
174
Table 8-1 Data Store Commands
174
Table 8-2 Data Store Example
175
9 Sweep Operation
180
Sweep Operation
177
Figure 9-1 Linear Staircase Sweep
178
Sweep Types
178
Figure 9-2 Logarithmic Staircase Sweep
179
Figure 9-3 Custom Pulse Sweep
180
Table 9-1 Logarithmic Sweep Points
180
Figure 9-4 Custom Sweep with Different Pulse Widths
181
Source Memory Sweep
181
Figure 9-5 Six-Point Test Branching Example
184
Figure 9-6 Typical Diode I-V Curve and Test Points (Not to Scale)
185
Configuring and Running a Sweep
187
Figure 9-7 Sweep Configuration Menu Tree
188
Performing Sweeps
189
Remote Sweep Operation
194
Figure 9-8 Connections for Diode I-V Tests
195
Figure 9-9 Diode I-V Curve
195
Table 9-6 Custom Sweep Programming Example
197
Table 9-7 Source Memory Sweep Commands
197
Table 9-8 Source Memory Sweep Programming Example
198
10 Triggering
226
Triggering
203
Trigger Model (Front Panel Operation)
204
Figure 10-1 Trigger Model (Front Panel Operation)
205
Event Detection
206
Trigger Delay
207
Counters
208
Bench Defaults
209
Figure 10-2 Rear Panel Pinout
210
Figure 10-3 Trigger Link Input Pulse Specifications
210
Input Trigger Requirements
210
Figure 10-4 Trigger Link Output Pulse Specifications
211
Figure 10-5 DUT Test System
211
Figure 10-6 Trigger Link Connections
212
Figure 10-7 Operation Model for Triggering Example
214
Configuring Triggering
215
Figure 10-8 Configure Trigger Menu Tree
217
Idle and Initiate
218
Figure 10-9 Trigger Model (Remote Operation)
219
Event Detection
220
Trigger Layer
221
Figure 10-10 Measure Action
222
Trigger Delay
222
Counters
223
GPIB Defaults
224
Remote Trigger Commands
225
Remote Trigger Example
226
Table 10-2 Remote Triggering Example
226
11 Limit Testing
247
Limit Testing
227
Figure 11-1 Limits Tests
228
Types of Limits
228
Data Flow
229
Limit Test Modes
230
Figure 11-2 Grading Mode Limit Testing
231
Figure 11-3 Immediate Binning
232
Sorting Mode
234
Figure 11-5 Sorting Mode Limit Testing
235
Binning Systems
236
Figure 11-6 Handler Interface Connections
236
Handler Types
237
Basic Binning Systems
238
Multiple-Element Device Binning
239
Digital Output Clear Pattern
240
Configuring and Performing Limit Tests
241
Figure 11-10 Limits Configuration Menu Tree
243
Performing Limit Tests
243
Remote Limit Testing
245
Figure 11-11 Diode Pass/Fail Limits
246
Limit Test Programming Example
246
Table 11-2 Limits Test Programming Example
247
Table 11-3 Limits Test Results Summary
247
12 Digital I/O Port, Interlock, and Output Configuration
253
Digital I/O Port, Interlock, and Output Configuration
250
Digital Output Configuration
251
Controlling Digital Output Lines
252
Figure 12-3 Source Operation
252
Table 12-1 Digital Output Line Settings
253
Safety Interlock
254
Figure 12-5 Output Configuration Menu Tree
255
Front Panel Output Configuration
255
Output-Off States
256
Output off States and Inductive Loads
257
Output Configuration Programming Example
258
13 Remote Operations
264
Remote Operations
259
Differences: Remote Vs. Local Operation
260
Remote-To-Local Transition
261
Figure 13-1 IEEE-488 Connector
262
GPIB Operation
262
Figure 13-2 IEEE-488 Connections
263
Primary Address
264
Table 13-1 General Bus Commands
264
REN (Remote Enable)
265
DCL (Device Clear)
266
Error and Status Messages
267
Front Panel Gpib Operation
267
Command Words
268
Local Key
268
Programming Syntax
268
Query Commands
270
Program Messages
271
Response Messages
273
Message Exchange Protocol
274
Sending and Receiving Data
274
Baud Rate
275
Flow Control (Signal Handshaking)
276
Error Messages
277
Table 13-2 PC Serial Port Pinout
277
Programming Example
278
14 Status Structure
282
15 Common Commands
300
Status Structure
279
Overview
280
Figure 14-1 Sourcemeter Status Register Structure
281
Table 14-1 Common and SCPI Commands to Reset Registers and Clear Queues
282
Programming and Reading Registers
283
Programming Enable Registers
283
Reading Registers
284
Status Byte and Service Request (SRQ)
285
Status Byte Register
286
Serial Polling and Srq
287
Service Request Enable Register
287
Status Byte and Service Request Commands
288
Register Bit Descriptions
289
Figure 14-5 Operation Event Status
291
Figure 14-6 Measurement Event Status
293
Condition Registers
294
Figure 14-7 Questionable Event Status
294
Event Enable Registers
295
Event Registers
295
Output Queue
297
Table 14-9 Error Queue Commands
298
Command Summary
300
Table 15-1 IEEE-488.2 Common Commands and Queries
300
Command Reference
301
SAV <Nrf> — Save
302
Table 15-2 *OPC Programming Example
302
RST — Reset
303
TST? — Self-Test Query
304
Measurement Commands
305
Configure:<Function>
306
Acquiring Readings
307
Sense[1]]:Data[:Latest]?
308
Measure[:<Function>]?
309
16 SCPI Signal-Oriented Measurement Commands
320
17 SCPI Command Reference
320
SCPI Command Reference
311
Reference Tables
312
Table 17-5 Sense Command Summary
320
Table 17-7 Status Command Summary
327
Table 17-9 Trace Command Summary
329
Table 17-10 Trigger Command Summary
330
Calculate Subsystems
332
Assign Unit SuffiX
337
Enable and Read Math Expression Result
340
Calculate2
341
Read CALC2
342
Configure and Control Limit Tests
343
Composite Testing
347
Clear Test Results
349
Calculate3
350
Display Subsystem
351
Read Display
353
Data Format
354
Format Subsystem
354
Figure 17-1 ASCII Data Format
355
Figure 17-2 IEEE-754 Single Precision Data Format (32 Data Bits)
355
Data Elements
356
CALC Data Elements
360
Byte Order
361
Output Subsystem
362
Output-Off States
363
Sense1 Subsystem
364
Select Measurement Range
367
Select Auto Range
368
Set Compliance Limit
369
Set Measurement Speed
370
Source Subsystem
374
Select Function Mode
375
Select Range
376
Set Amplitude for Fixed Source
377
Set Voltage Limit
379
Set Delay
380
Configure Voltage and Current Sweeps
381
Configure List
386
Configure Memory Sweep
387
Set Scaling Factor
389
Sweep and List Program Examples
390
Soak Time
392
Clearing Digital Output
394
Status Subsystem
396
Read Condition Registers
397
Default Conditions
399
System Subsystem
399
Select Guard Mode
400
Control Beeper
401
Control Auto Zero
402
Select Power Line Frequency Setting
403
Error Queue
404
Simulate Key Presses
405
Read Version of SCPI Standard
406
RS-232 Interface
407
Reset Timestamp
408
Trace Subsystem
409
Select Timestamp Format
411
Trigger Subsystem
412
Abort Source/Measure Cycle
413
Performance Verification
419
Verification Tests
419
Introduction
420
Warm-Up Period
421
Figure 18-1 Test Resistor Construction
423
Restoring Factory Defaults
424
Test Considerations
425
Test Summary
425
Setting the Source Range and Output Value
426
Maximum Compliance Values
427
Determining Compliance Limit
428
Figure 18-2 Connections for Mainframe Voltage Verification Tests
429
Verification Tests
429
Mainframe Voltage Measurement Accuracy
430
Figure 18-3 Connections for Mainframe Current Verification Tests
431
Verification Tests
431
Mainframe Current Measurement Accuracy
432
Figure 18-4 Connections for Mainframe Resistance Accuracy Verification
433
Remote Preamp Verification
435
Remote Preamp Output Voltage Accuracy
436
Remote Preamp Voltage Measurement Accuracy
437
Remote Preamp Output Current Accuracy
438
Figure 18-6 Connections for 1Μa-100Ma Range Current Verification Tests
439
Figure 18-7 Connections for 1Pa-100Na Range Current Verification Tests
440
Remote Preamp Current Measurement Accuracy
442
Remote Preamp Resistance Measurement Accuracy
444
Figure 18-8 Connections for Remote Preamp 20Ω-200MΩ
445
GΩ-200GΩ Range Accuracy
446
Figure 18-10 Connections for Remote Preamp 2TΩ and 20TΩ Range Verification
448
TΩ and 20TΩ Range Accuracy
448
Temperature and Relative Humidity
452
Calibration Considerations
453
Calibration Cycle
453
Recommended Calibration Equipment
454
Unlocking Calibration
455
Mainframe Calibration
456
Figure 19-1 Mainframe Voltage Calibration Test Connections
457
Figure 19-2 Mainframe Current Calibration Connections
460
Remote Preamp Calibration
464
Remote Preamp Calibration Procedure
465
Figure 19-3 Voltage Burden Calibration Connections
466
Figure 19-4 1Μa and 10Μa Range Gain Calibration Connections
467
Figure 19-5 1Pa to 100Na Range Gain Calibration Connections
469
Changing the Password
471
Viewing Calibration Dates and Calibration Count
472
Figure 20-1 Rear Panel
474
Line Fuse Replacement
474
Front Panel Tests
475
DISPLAY PATTERNS Test
476
Specifications
481
Accuracy Calculations
483
Source-Delay-Measure (SDM) Cycle Timing
484
Timing Diagrams
485
Figure A-3 Case III Timing Diagram
486
Figure A-4 Case IV Timing Diagram
487
Figure A-5 Case V Timing Diagram
488
Introduction
490
Eliminating Common SCPI Errors
496
Introduction
500
Fetch?
501
Trace:data?
502
Bus Description
504
Figure D-1 IEEE-488 Bus Configuration
505
Bus Lines
506
Data Lines
506
Bus Management Lines
507
Handshake Lines
507
Bus Commands
508
Uniline Commands
509
Addressed Multiline Commands
510
Universal Multiline Commands
510
Address Commands
511
Scpi Commands
511
Unaddress Commands
511
Command Codes
512
Figure D-3 Command Codes
513
Typical Command Sequences
514
Ieee Command Groups
515
Interface Function Codes
516
Figure F
524
Low Current Measurements
525
Figure F-2 Guarding an Ionization Chamber
526
Noise and Source Impedance
527
Generated Currents
528
Electrochemical Effects
530
Piezoelectric and Stored Charge Effects
530
Triboelectric Effects
530
Figure F-3 Voltage Burden
531
Loading Effects
532
Cable Leakage Resistance
533
Figure F-7 Settling Time
534
High Resistance Measurements
535
Figure F-8 Power Line Ground Loops
536
Figure F-9 Eliminating Ground Loops
536
Electrostatic Interference
537
Electromagnetic Interference (EMI)
538
Introduction
540
Protocol Differences
541
Figure G-1 IEEE-488 Handshake Sequence
542
Trigger-On-Talk
543
GPIB Reading Speed Comparisons
544
Single-Shot Operation
545
Figure 12-2 Sink Operation
549
Figure 17-3 Key-Press Codes
550
Figure 5-5 I-Source Boundaries
550
Figure 1-4 Triax Connectors
553
Figure 5-9 Source I
554
Figure 14-3 Status Byte and Service Request (SRQ)
555
Figure 5-1 Source-Delay-Measure (SDM) Cycle
555
Table 9-2 Source Memory Saved Configurations
555
Voltage Burden
556
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Keithley 6430 Specifications
General
Brand
Keithley
Model
6430
Category
Measuring Instruments
Language
English
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