Regulations and Standards
22
G5 Series AC Servo Drives With Built-in EtherCAT Communications, Linear Motor Type
Regulations and Standards
To export (or provide to nonresident aliens) any part of this product that falls under the category of
goods (or technologies) for which an export certificate or license is mandatory according to the Foreign
Exchange and Foreign Trade Control Law of Japan, an export certificate or license (or service
transaction approval) according to this law is required.
Therefore, for the G5-series Servo Drive which is an EC-compliant product, it is the user's responsibility
to check and ensure the compliance of the equipment and the entire system with the applicable EC
Directives.
Note To conform to EMC Directives, the Servo Drive must be installed under the conditions described in 4-3
Wiring Conforming to EMC Directives on page 4-31.
• Servo Drives conform to the SEMI F47 standard for momentary power interruptions (voltage sag
immunity) for no-load or light-load operation.
• This standard applies to semiconductor manufacturing equipment.
Note 1 It does not apply to Servo Drivers with single-phase 100-V specifications or with 24-VDC
specifications for the control power input.
2 Always perform evaluation testing for SEMI F47 compliance in the actual system.
Conformance to EC Directives
EC
Directive
Product Applicable standards
Low Voltage
Directive
AC Servo Drives EN 61800-5-1: 2007
EMC
Directive
AC Servo Drives EN 55011/A2: 2007 (CISPR11)
IEC 61800-3: 2005
EN 61000-6-2: 2004
Machinery
Directive
AC Servo Drives EN954-1: 1996 Cat.3
EN ISO13849-1: 2008 PL c, PL d
(MTTFd=85.9 years, Dcavg=87.5%)
EN61508: 2001(Part 1, 2, 4) SIL2
EN62061: 2005 SIL2
EN61800-5-2: 2007(STO)
IEC61326-3-1: 2008
UL and cUL Standards
Standard Product Applicable standards File number
UL
standards
AC Servo Drives UL 508C E164620
CSA
standards
AC Servo Drives CSA 22.2 No. 14
SEMI F47
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