Omron E5AR - MANUAL 2 User Manual

Section 3 Typical Control Examples
3-2
Typical Control
Examples
3.1 Standard control
The following is an example of basic, single-loop control whereby temperature control of a heater plate for
semiconductors is carried out (example of combined sensor and heater).
■ Application
When controlling a heater plater for semiconductor wafers with the
E5AR, the control mode is set to standard control and instrumentation
is as shown in the following example.
■ Wiring The platinum resistance temperature input sensor Pt100 is connected
to the IN1 terminal, and the OUT1 terminal is connected to the SSR.
Wiring for the E5AR-Q4B is shown in the following schematic.
The control period can be set from 0.2 sec to 99.0 sec-
onds on the E5AR/ER. (The shortest setting on our previ-
ous models was 1 sec).
For high precision control applications that previously
required the combined use of our cycle control unit
(G32A-EA) and an SSR, the G32A-EA is now no longer
needed.
IN1
PV
+
-
SP
Channel 1
PID*
MV
OUT1
SUB1 SUB2 SUB3 SUB4 U-ALM
PV
SV
MV
OUT1 OUT2
OUT3 OUT4 STOP RSP
8
8.8.8.8.8
8.8.8.8.8
8.8.8.8
A/M
PF1 PF2/CH
Sensor
Heater
IN1 OUT1
SSR
G3PA
Hint
1
2
3
4
5
6
1
2
3
4
5
6
1
2
3
4
5
6
1
2
3
4
5
6
FGHI JK
ABCDE
IN1
OUT1
Sensor
Sensor
SSR
G3PA
100 - 240 V AC
E5AR

Omron E5AR - MANUAL 2 Specifications

General

Brand	Omron
Model	E5AR - MANUAL 2
Category	Controller
Language	English