Section 3 Typical Control Examples
3-4
Typical Control
Examples
6. Press the L key less than 1 second to move from "RUN level" to
"Adjustment level".
7. Press the M repeatedly to select "cp: Control period (heat)", and then
press the D key to select "0.2".
■ Adjustment
To adjust the PID constants, run AT.
For more information, see "4.10 Determining the PID constants (AT,
manual settings)" (P.4-20).
bank
0
l.adj
Adjustment level
cp
20.0
l.adj
Control period
(
Heat
)
0.2
D
If the overshoot of temperature control (disturbance
response) is too large after placing the wafer, the over-
shoot can be adjusted using the disturbance overshoot
adjustment function.
For information on the disturbance overshoot adjustment
function. Refer to "5.2 Control functions" (P.5-8).
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